Patents by Inventor Manoj Kumar MRIDHA

Manoj Kumar MRIDHA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • INTERFEROMETER SYSTEM, METHOD OF DETERMINING A MODE HOP OF A LASER SOURCE OF AN INTERFEROMETER SYSTEM, METHOD OF DETERMINING A POSITION OF A MOVABLE OBJECT, AND LITHOGRAPHIC APPARATUS
    Publication number: 20230324164
    Abstract: An interferometer system including: an optical system arranged to split a radiation beam from a laser source into a first beam along a first optical path and a second beam along a second optical path, and recombine the first beam and the second beam to a recombined beam, a detector to receive the recombined beam and to provide a detector signal based on the received recombined beam, and a processing unit, wherein a first optical path length of the first optical path and a second optical path length of the second optical path have an optical path length difference, and wherein the processing unit is arranged to determine a mode hop of the laser source on the basis of a phase shift in the detector signal.
    Type: Application
    Filed: May 30, 2023
    Publication date: October 12, 2023
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Maarten Jozef JANSEN, Manoj Kumar MRIDHA, Engelbertus Antonius Fransiscus VAN DER PASCH
  • Interferometer system, method of determining a mode hop of a laser source of an interferometer system, method of determining a position of a movable object, and lithographic apparatus
    Patent number: 11719529
    Abstract: An interferometer system including: an optical system arranged to split a radiation beam from a laser source into a first beam along a first optical path and a second beam along a second optical path, and recombine the first beam and the second beam to a recombined beam, a detector to receive the recombined beam and to provide a detector signal based on the received recombined beam, and a processing unit, wherein a first optical path length of the first optical path and a second optical path length of the second optical path have an optical path length difference, and wherein the processing unit is arranged to determine a mode hop of the laser source on the basis of a phase shift in the detector signal.
    Type: Grant
    Filed: May 11, 2020
    Date of Patent: August 8, 2023
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Maarten Jozef Jansen, Manoj Kumar Mridha, Engelbertus Antonius Fransiscus Van der Pasch
  • INTERFEROMETER SYSTEM, METHOD OF DETERMINING A MODE HOP OF A LASER SOURCE OF AN INTERFEROMETER SYSTEM, METHOD OF DETERMINING A POSITION OF A MOVABLE OBJECT, AND LITHOGRAPHIC APPARATUS
    Publication number: 20220205775
    Abstract: An interferometer system including: an optical system arranged to split a radiation beam from a laser source into a first beam along a first optical path and a second beam along a second optical path, and recombine the first beam and the second beam to a recombined beam, a detector to receive the recombined beam and to provide a detector signal based on the received recombined beam, and a processing unit, wherein a first optical path length of the first optical path and a second optical path length of the second optical path have an optical path length difference, and wherein the processing unit is arranged to determine a mode hop of the laser source on the basis of a phase shift in the detector signal.
    Type: Application
    Filed: May 11, 2020
    Publication date: June 30, 2022
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Maarten Jozef JANSEN, Manoj Kumar MRIDHA, Engelbertus Antonius Fransiscus VAN DER PASCH