Patents by Inventor Manoocher M.B. Birang

Manoocher M.B. Birang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Forming a transparent window in a polishing pad for a chemical mehcanical polishing apparatus
    Publication number: 20010036805
    Abstract: The polishing pad for a chemical mechanical polishing apparatus, and a method of making the same. The polishing pad has a covering layer with a polishing surface and a backing layer which is adjacent to the platen. A first opening in the covering layer with a first cross-sectional area and a second opening in the backing layer with a second, different cross-sectional area form an aperture through the polishing pad. A substantially transparent polyurethane plug is positioned in the aperture, and an adhesive material fixes the plug in the aperture.
    Type: Application
    Filed: May 22, 2001
    Publication date: November 1, 2001
    Applicant: Applied Materials, Inc., a Delaware corporation
    Inventors: Manoocher M.B. Birang, Allan Gleason, William L. Guthrie