Patents by Inventor Manoohcer Birang

Manoohcer Birang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pad cleaning brush for chemical mechanical polishing apparatus and method of making the same
    Patent number: 6224470
    Abstract: A pad cleaning brush and method for making the same is used in conjunction with spray rinse water to thoroughly clean a polishing pad of a chemical-mechanical polishing apparatus after a wafer has been polished. The bristles of the brush are securely retained within the brush by a welding process. This prevents the bristles from remaining on the polishing pad after the cleaning operation, thereby preventing the remaining bristles from damaging a subsequently polished wafer.
    Type: Grant
    Filed: September 29, 1999
    Date of Patent: May 1, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Gee Hoey, Manoohcer Birang