Abstract: A micromechanical sensor device and a corresponding production method. The micromechanical sensor device is equipped with a micromechanical sensor device including a MEMS sensor chip, which has a first upper side and a first underside, and an ASIC chip, which has a second upper side and a second underside, wherein an exposed cavity is formed on the first upper side. A sensor core of the MEMS sensor chip is elastically suspended inside the cavity via a spring device on the periphery of the cavity in the sensor chip. The ASIC chip is bonded with the second upper side to the first upper side of the MEMS sensor chip. A passage opening that opens into the cavity is provided on the first underside as a media access, wherein the sensor core includes at least one sensor region that is sensitive to a medium passed through the passage opening.

Abstract: A sensor device. The sensor device includes at least one first substrate having a first substrate surface; a sensor element layer having at least one sensitive element arranged in the sensor element layer, wherein the sensor element layer covers the first substrate surface and/or at least one intermediate layer at least partially covering the first substrate surface; and at least one capacitor apparatus, wherein the at least one capacitor apparatus is formed in the first substrate and/or in a second substrate which is electrically connected to the first substrate via at least one bonding connection. A production method for a sensor device, and an operation method for a sensor device, are also described.

Abstract: A membrane sensor. The membrane sensor includes: a pressure sensor configured to generate a first sensor signal depending on a deflection of a pressure-loadable membrane; an acceleration sensor configured to generate a second sensor signal depending on an acceleration acting on a MEMS functional structure; and an evaluation circuit configured to compensate for a dependence of the first sensor signal on an acceleration force, in particular weight force, acting on the membrane, based on the second sensor signal. The pressure sensor and the acceleration sensor are stacked one above the other in a z direction. A method for generating a compensated sensor signal using such a membrane sensor is also described.