Abstract: A high sensitivity strain sensor that utilizes a micro-scale cavity built in a multi-layer structure, with a pair of interdigitalized capacitor incorporated on one of the layers, is described in this document. The device's capacitance changes produced by unattended deformations of the cavity can be used to measure the associated strain without using any movable electrodes. The sensor can be remotely energized from a radio frequency wave sent by a reader antenna to construct a battery-free wireless instrument. Changes on the sensor's resonant frequency are remotely detected so that a strain level is measured from fluctuations in the received signal. This detection method provides a simple, reliable and sensitive technique to measure small strain changes down to the pico-scale. Materials with a highly strain-dependant permittivity are integrated in the sensor to enhance its sensitivity. The proposed sensor consists of a simple planar structure.

Abstract: The present invention is directed to a method of controlling the application of a surface coating by chemical deposition using a closed loop control on growth rate. The method compares a measure of growth rate against a setpoint for the growth rate and adjusts a primary input parameter in order to drive/maintain the measure of growth rate equal to the setpoint.