Patents by Inventor Manuela Schweikert

Manuela Schweikert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6338743
    Abstract: The present invention relates to buffer systems in the form of solutions or salts for preparing suspensions which can be used for chemomechanical polishing. In particular, these buffer systems can be used for preparing suspensions having a high pH of 9.5-13 which are used for the chemomechanical polishing of Si and metal surfaces of semiconductors, known as wafers.
    Type: Grant
    Filed: April 3, 2000
    Date of Patent: January 15, 2002
    Assignee: Merck Patent Gesellschaft mit beschrankter Haftung
    Inventors: Claus Dusemund, Rudolf Rhein, Manuela Schweikert, Martin Hostalek