Patents by Inventor Manuela Vidal Dasilva

Manuela Vidal Dasilva has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • NARROWBAND FILTERS FOR THE EXTREME ULTRAVIOLET
    Publication number: 20100271693
    Abstract: A filter for extreme ultraviolet is disclosed. The filter may be formed by a multilayer structure comprising several layers of Yb and Al deposited on a substrate using thermal evaporation. The layers of Yb and Al may be separated by SiO layers, which may act as barriers avoiding interaction between the layers. The multilayer structure may be covered by a SiO protective layer.
    Type: Application
    Filed: April 24, 2009
    Publication date: October 28, 2010
    Inventors: Manuela Vidal Dasilva, Mónica Fernandez Perea, Juan Ignacio Larruquert Goicoechea, José Antonio Mendez Morales, José Antonio Aznarez Candao, José María Sanchez Orejuela