Patents by Inventor Mapper Lithography IP B.V.

Mapper Lithography IP B.V. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and System for Realizing a Vacuum in a Vacuum Chamber
    Publication number: 20130133752
    Abstract: The invention relates to a method for realizing a vacuum in at least one vacuum chamber. The method comprises providing an arrangement comprising a plurality of vacuum chambers, wherein each vacuum chamber is connected to a shared vacuum system. The shared vacuum system comprises a plurality of turbo molecular pumps, at least one common fore pump, and a piping system comprising one or more pipes for connecting the at least one common fore pump to each of the plurality of turbo molecular pumps. Each turbo molecular pump is separately connected to a corresponding vacuum chamber. The piping system further comprises flow regulators for controlling a flow within the piping system. The method further comprises selecting at least one vacuum chamber for pump-down, and separately pumping down the at least one selected vacuum chamber by means of the shared vacuum system.
    Type: Application
    Filed: January 2, 2013
    Publication date: May 30, 2013
    Applicant: MAPPER LITHOGRAPHY IP B.V.
    Inventor: Mapper Lithography IP B.V.