Patents by Inventor Marc Adam Bergendahl

Marc Adam Bergendahl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11869936
    Abstract: A semiconductor device includes a fin structure including a recess formed in an upper surface of the fin structure, an inner gate formed in the recess of the fin structure, and an outer gate formed outside and around the fin structure.
    Type: Grant
    Filed: August 14, 2021
    Date of Patent: January 9, 2024
    Assignee: International Business Machines Corporation
    Inventors: Marc Adam Bergendahl, Gauri Karve, Fee Li Lie, Eric R. Miller, Robert Russell Robison, John Ryan Sporre, Sean Teehan
  • Patent number: 11869937
    Abstract: A semiconductor device including a fin structure including a recess, a first gate formed in the recess of the fin structure, and a second gate formed outside the fin structure.
    Type: Grant
    Filed: January 19, 2022
    Date of Patent: January 9, 2024
    Assignee: International Business Machines Corporation
    Inventors: Marc Adam Bergendahl, Gauri Karve, Fee Li Lie, Eric R. Miller, Robert Russell Robison, John Ryan Sporre, Sean Teehan
  • Publication number: 20220140074
    Abstract: A semiconductor device including a fin structure including a recess, a first gate formed in the recess of the fin structure, and a second gate formed outside the fin structure.
    Type: Application
    Filed: January 19, 2022
    Publication date: May 5, 2022
    Inventors: Marc Adam Bergendahl, Gauri Karve, Fee Li Lie, Eric R. Miller, Robert Russell Robison, John Ryan Sporre, Sean Teehan
  • Patent number: 11239316
    Abstract: A semiconductor device includes a fin structure including a cylindrical shape, an inner gate formed inside the fin structure, and an outer gate formed outside the fin structure and connected to the inner gate.
    Type: Grant
    Filed: April 30, 2019
    Date of Patent: February 1, 2022
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Marc Adam Bergendahl, Gauri Karve, Fee Li Lie, Eric R. Miller, Robert Russell Robison, John Ryan Sporre, Sean Teehan
  • Publication number: 20210376078
    Abstract: A semiconductor device includes a fin structure including a recess formed in an upper surface of the fin structure, an inner gate formed in the recess of the fin structure, and an outer gate formed outside and around the fin structure.
    Type: Application
    Filed: August 14, 2021
    Publication date: December 2, 2021
    Inventors: Marc Adam BERGENDAHL, Gauri KARVE, Fee Li LIE, Eric R. MILLER, Robert Russell ROBISON, John Ryan SPORRE, Sean TEEHAN
  • Patent number: 11127815
    Abstract: A semiconductor device includes a fin structure having a circular cylindrical shape, and including a first recess formed on a first side of the fin structure and a second recess formed on a second side of the fin structure opposite the first side, an inner gate formed inside the fin structure, and an inner gate insulating layer formed between the inner gate and an inner surface of the fin structure.
    Type: Grant
    Filed: April 30, 2019
    Date of Patent: September 21, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Marc Adam Bergendahl, Gauri Karve, Fee Li Lie, Eric R. Miller, Robert Russell Robison, John Ryan Sporre, Sean Teehan
  • Patent number: 10658154
    Abstract: A system for performing diffraction analysis, includes a mill for removing a surface portion of a sample, and an analyzer for performing diffraction analysis on the milled sample.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: May 19, 2020
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Marc Adam Bergendahl, James John Demarest, Christopher J. Penny, Roger Allen Quon, Christopher Joseph Waskiewicz
  • Publication number: 20190259832
    Abstract: A semiconductor device includes a fin structure having a circular cylindrical shape, and including a first recess formed on a first side of the fin structure and a second recess formed on a second side of the fin structure opposite the first side, an inner gate formed inside the fin structure, and an inner gate insulating layer formed between the inner gate and an inner surface of the fin structure.
    Type: Application
    Filed: April 30, 2019
    Publication date: August 22, 2019
    Inventors: Marc Adam BERGENDAHL, Gauri KARVE, Fee Li LIE, Eric R. MILLER, Robert Russell ROBISON, John Ryan SPORRE, Sean TEEHAN
  • Publication number: 20190259833
    Abstract: A semiconductor device includes a fin structure including a cylindrical shape, an inner gate formed inside the fin structure, and an outer gate formed outside the fin structure and connected to the inner gate.
    Type: Application
    Filed: April 30, 2019
    Publication date: August 22, 2019
    Inventors: Marc Adam BERGENDAHL, Gauri Karve, Fee Li Lie, Eric R. Miller, Robert Russell Robison, John Ryan Sporre, Sean Teehan
  • Patent number: 10381437
    Abstract: A semiconductor device includes a fin structure including a cylindrical shape, an inner gate formed inside the fin structure, and an outer gate formed outside the fin structure and connected to the inner gate.
    Type: Grant
    Filed: December 30, 2017
    Date of Patent: August 13, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Marc Adam Bergendahl, Gauri Karve, Fee Li Lie, Eric R. Miller, Robert Russell Robison, John Ryan Sporre, Sean Teehan
  • Publication number: 20190035599
    Abstract: A system for performing diffraction analysis, includes a mill for removing a surface portion of a sample, and an analyzer for performing diffraction analysis on the milled sample.
    Type: Application
    Filed: July 31, 2018
    Publication date: January 31, 2019
    Inventors: Marc Adam BERGENDAHL, James John DEMAREST, Christopher J. PENNY, Roger Allen QUON, Christopher Joseph WASKIEWICZ
  • Patent number: 10109455
    Abstract: A system for performing diffraction analysis, includes a focused ion beam (FIB) device for preparing a sample, a mill for removing a surface portion of the prepared sample, and an analyzer for performing diffraction analysis on the milled sample.
    Type: Grant
    Filed: February 28, 2018
    Date of Patent: October 23, 2018
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Marc Adam Bergendahl, James John Demarest, Christopher J. Penny, Roger Allen Quon, Christopher Joseph Waskiewicz
  • Publication number: 20180190470
    Abstract: A system for performing diffraction analysis, includes a focused ion beam (FIB) device for preparing a sample, a mill for removing a surface portion of the prepared sample, and an analyzer for performing diffraction analysis on the milled sample.
    Type: Application
    Filed: February 28, 2018
    Publication date: July 5, 2018
    Inventors: Marc Adam BERGENDAHL, James John DEMAREST, Christopher J. PENNY, Roger Allen QUON, Christopher Joseph WASKIEWICZ
  • Patent number: 9978560
    Abstract: A system for performing nano beam diffraction (NBD) analysis, includes a focused ion beam (FIB) device for preparing a transmission electron microscopy (TEM) sample, a broad beam ion mill for milling the TEM sample to remove a surface portion of the TEM sample, and a strain analyzer for performing NBD analysis on the milled TEM sample to acquire diffraction data.
    Type: Grant
    Filed: June 30, 2016
    Date of Patent: May 22, 2018
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Marc Adam Bergendahl, James John Demarest, Christopher J. Penny, Roger Allen Quon, Christopher Joseph Waskiewicz
  • Publication number: 20180122947
    Abstract: A semiconductor device includes a fin structure including a cylindrical shape, an inner gate formed inside the fin structure, and an outer gate formed outside the fin structure and connected to the inner gate.
    Type: Application
    Filed: December 30, 2017
    Publication date: May 3, 2018
    Inventors: Marc Adam Bergendahl, Gauri Karve, Fee Li Lie, Eric R. Miller, Robert Russell Robison, John Ryan Sporre, Sean Teehan
  • Patent number: 9917196
    Abstract: A semiconductor device includes a fin structure comprising a cylindrical shape and including a recess formed in an upper surface of the fin structure, an inner gate formed inside the fin structure, an outer gate formed outside the fin structure, and a conductor formed in the recess and connecting the inner and outer gates.
    Type: Grant
    Filed: October 14, 2016
    Date of Patent: March 13, 2018
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Marc Adam Bergendahl, Gauri Karve, Fee Li Lie, Eric R. Miller, Robert Russell Robison, John Ryan Sporre, Sean Teehan
  • Publication number: 20180005798
    Abstract: A system for performing nano beam diffraction (NBD) analysis, includes a focused ion beam (FIB) device for preparing a transmission electron microscopy (TEM) sample, a broad beam ion mill for milling the TEM sample to remove a surface portion of the TEM sample, and a strain analyzer for performing NBD analysis on the milled TEM sample to acquire diffraction data.
    Type: Application
    Filed: June 30, 2016
    Publication date: January 4, 2018
    Inventors: Marc Adam BERGENDAHL, James John Demarest, Christopher J. Penny, Roger Allen Quon, Christopher Joseph Waskiewicz
  • Patent number: 9627377
    Abstract: Embodiments of the present invention provide a method of forming semiconductor structure. The method includes forming a set of device features on top of a substrate; forming a first dielectric layer directly on top of the set of device features and on top of the substrate, thereby creating a height profile of the first dielectric layer measured from a top surface of the substrate, the height profile being associated with a pattern of an insulating structure that fully surrounds the set of device features; and forming a second dielectric layer in areas that are defined by the pattern to create the insulating structure. A structure formed by the method is also disclosed.
    Type: Grant
    Filed: November 11, 2014
    Date of Patent: April 18, 2017
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Marc Adam Bergendahl, Kangguo Cheng, David Vaclav Horak, Ali Khakifirooz, Shom Ponoth, Theodorus Eduardus Standaert, Chih-Chao Yang, Charles William Koburger, III, Xiuyu Cai, Ruilong Xie
  • Publication number: 20150061040
    Abstract: Embodiments of the present invention provide a method of forming semiconductor structure. The method includes forming a set of device features on top of a substrate; forming a first dielectric layer directly on top of the set of device features and on top of the substrate, thereby creating a height profile of the first dielectric layer measured from a top surface of the substrate, the height profile being associated with a pattern of an insulating structure that fully surrounds the set of device features; and forming a second dielectric layer in areas that are defined by the pattern to create the insulating structure. A structure formed by the method is also disclosed.
    Type: Application
    Filed: November 11, 2014
    Publication date: March 5, 2015
    Inventors: Marc Adam Bergendahl, Kangguo Cheng, David Vaclav Horak, Ali Khakifirooz, Shom Ponoth, Theodorus Eduardus Standaert, Chih-Chao Yang, Charles William Koburger, III, Xiuyu Cai, Ruilong Xie
  • Patent number: 8941156
    Abstract: Embodiments of the present invention provide a method of forming semiconductor structure. The method includes forming a set of device features on top of a substrate; forming a first dielectric layer directly on top of the set of device features and on top of the substrate, thereby creating a height profile of the first dielectric layer measured from a top surface of the substrate, the height profile being associated with a pattern of an insulating structure that fully surrounds the set of device features; and forming a second dielectric layer in areas that are defined by the pattern to create the insulating structure. A structure formed by the method is also disclosed.
    Type: Grant
    Filed: January 7, 2013
    Date of Patent: January 27, 2015
    Assignees: International Business Machines Corporation, GlobalFoundries, Inc.
    Inventors: Marc Adam Bergendahl, Kangguo Cheng, David Vaclav Horak, Ali Khakifirooz, Shom Ponoth, Theodorus Eduardus Standaert, Chih-Chao Yang, Charles William Koburger, III, Xiuyu Cai, Ruilong Xie