Patents by Inventor Marc Alan Szeto-Millstone

Marc Alan Szeto-Millstone has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optimizing lithographic mask for manufacturability in efficient manner
    Patent number: 8719735
    Abstract: Mask layout data of a lithographic mask includes polygons that each include horizontal and vertical edges. Each of a number of target edge pairs is defined by two edges of one or more of the polygons. A search box having a boundary coincident with a given edge of the edges of the polygons is specified. Whether the search box includes at least one edge of the edges of the polygons in addition to the given edge is determined. Where the search box includes at least one edge, at least one of the target edge pairs is specified as including the given edge and one of the at least one edge. For each target edge pair that has been specified, a manufacturability penalty value is determined. A dynamic manufacturability constraint table and a non-zero multiplier table are maintained.
    Type: Grant
    Filed: July 14, 2011
    Date of Patent: May 6, 2014
    Assignee: International Business Machines Corporation
    Inventors: Masaharu Sakamoto, Alan E. Rosenbluth, Marc Alan Szeto-Millstone, Tadanobu Inoue, Kehan Tian, Andreas Waechter, Jonathan Lee, David Osmond Melville
  • Optimizing lithographic mask for manufacturability in efficient manner
    Publication number: 20130019211
    Abstract: Mask layout data of a lithographic mask includes polygons that each include horizontal and vertical edges. Each of a number of target edge pairs is defined by two edges of one or more of the polygons. A search box having a boundary coincident with a given edge of the edges of the polygons is specified. Whether the search box includes at least one edge of the edges of the polygons in addition to the given edge is determined. Where the search box includes at least one edge, at least one of the target edge pairs is specified as including the given edge and one of the at least one edge. For each target edge pair that has been specified, a manufacturability penalty value is determined. A dynamic manufacturability constraint table and a non-zero multiplier table are maintained.
    Type: Application
    Filed: July 14, 2011
    Publication date: January 17, 2013
    Inventors: Masaharu Sakamoto, Alan E. Rosenbluth, Marc Alan Szeto-Millstone, Tadanobu Inoue, Kehan Tian, Andreas Waechter, Jonathan Lee, David Osmond Melville