Patents by Inventor Marc-Alexandre Bubois

Marc-Alexandre Bubois has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SILICON RESONATOR OF THE TUNING-FORK TYPE
    Publication number: 20100013360
    Abstract: The invention relates to a silicon resonator (10) of the tuning-fork type in which the linear frequency drift depending on the temperature is compensated. The resonator includes a silicon base (14), a plurality of parallel arms (11, 12, 13) capable of vibrating and actuator (18, 21, 22), wherein the arms include a silicon layer provided between two layers of silicon oxide having a thickness, relative to that of the silicon layer, such that it ensures the first-order compensation of the resonator thermal drift.
    Type: Application
    Filed: October 8, 2007
    Publication date: January 21, 2010
    Applicant: CSEM Centre Suisse d'Electronique et de Microtechnique Sa
    Inventors: Jacek Baborowski, Claude Bourgeois, Marc-Alexandre Bubois, David Ruffieux