Patents by Inventor Marc Conner

Marc Conner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Composition and process for stripping photoresist from a surface including titanium nitride
    Patent number: 9678430
    Abstract: A method and low pH compositions for removing bulk and/or hardened photoresist material from microelectronic devices have been developed. The low pH compositions include sulfuric acid and at least one phosphorus-containing acid. The low pH compositions effectively remove the hardened photoresist material while not damaging the underlying silicon-containing layer(s) or the metal gate materials.
    Type: Grant
    Filed: May 17, 2013
    Date of Patent: June 13, 2017
    Assignee: Entegris, Inc.
    Inventors: Emanuel I. Cooper, Marc Conner, Michael Owens
  • COMPOSITION AND PROCESS FOR STRIPPING PHOTORESIST FROM A SURFACE INCLUDING TITANIUM NITRIDE
    Publication number: 20150168843
    Abstract: A method and low pH compositions for removing bulk and/or hardened photoresist material from microelectronic devices have been developed. The low pH compositions include sulfuric acid and at least one phosphorus-containing acid. The low pH compositions effectively remove the hardened photoresist material while not damaging the underlying silicon-containing layer(s) or the metal gate materials.
    Type: Application
    Filed: May 17, 2013
    Publication date: June 18, 2015
    Applicant: ENTEGRIS, INC.
    Inventors: Emanuel I. Cooper, Marc Conner, Michael Owens