Abstract: An interferometric measuring device for recording the shape, the roughness or the clearance distance of the surface of a measured object is provided, the measuring device having a modulating interferometer, to which is supplied short-coherent radiation by a radiation source, and which has a first beam splitter for splitting the radiation supplied into a first beam component guided via a first arm, and into a second beam component guided via a second arm. One beam is shifted with respect to the other beam, with the aid of a modulating device, in terms of the beam's light phase or light frequency, and passes through a delay line. The two beams are subsequently combined at an additional beam splitter of the modulating interferometer.

Abstract: An interferometric measuring device for recording shape, roughness or separation distance of the surface of a measuring object, having a modulating interferometer, to which is supplied short coherent radiation by a radiation source, having a measuring probe that is spatially separated from the modulating interferometer and is coupled to it via a light-conducting fiber set-up, in which combined beam components are split in a common arm in a partially transmitting region into measuring and reference beams, and having receiver and evaluating devices for converting the supplied radiation into electrical signals and for evaluating the signals based on phase difference.

Abstract: An interferometric measuring device for recording the shape, the roughness or the clearance distance of the surface of a measured object is provided, the measuring device having a modulating interferometer, to which is supplied short-coherent radiation by a radiation source, and which has a first beam splitter for splitting the radiation supplied into a first beam component guided via a first arm, and into a second beam component guided via a second arm. One beam is shifted with respect to the other beam, with the aid of a modulating device, in terms of the beam's light phase or light frequency, and passes through a delay line. The two beams are subsequently combined at an additional beam splitter of the modulating interferometer.

Abstract: A method and a device for measuring at least one test surface and a reference test surface having an interference measuring probe which emits a first measuring beam which is aligned with respect to the reference test surface, are described. The measuring probe emits at least one second measuring beam, which is aligned with respect to at least the at least one test surface.

Abstract: An interferometric measuring device for recording shape, roughness or separation distance of the surface of a measuring object, having a modulating interferometer, to which is supplied short-coherent radiation by a radiation source, and having a first beam splitter for splitting the radiation supplied into first and second beam components guided respectively via first and second arms, of which the one is shifted as to the other with a modulating device in its light phase or light frequency, and passes through a delay line, and which are subsequently combined at an additional beam splitter of the modulating interferometer, having a measuring probe that is spatially separated from the modulating interferometer and is coupled/couple-able to it via a light-conducting fiber set-up, in which combined beam components are split in a common arm in a partially transmitting region into measuring and reference beams, and in which the measuring beam reflected at the surface and the reference beam reflected at a reference

Abstract: A method and a device for measuring at least one test surface and a reference test surface having an interference measuring probe which emits a first measuring beam which is aligned with respect to the reference test surface, are described. The measuring probe emits at least one second measuring beam, which is aligned with respect to at least the at least one test surface.

Abstract: An interferometric measuring device for detecting the shape, roughness or distance of surfaces is described. The interferometric measuring device has a modulation interferometer in which two partial beams are formed, one of which is shifted in its light phase or light frequency with respect to the other by a modulation device. The surface is measured with a measuring probe which is connected to the modulation interferometer and in which a measuring beam and a reference beam are formed, and an interference pattern which is analyzed in a connected receiving unit is formed from the measuring beam and the reference beam.

Abstract: A color television camera has a semiconductor image sensor composed of sensor elements of the CCD type arranged in a raster. The charges produced in the sensor elements within an integration interval are read out as video signals. The image on the semiconductor image sensor is shifted in the horizontal direction by a fraction of a raster unit of measurement from one integration interval to the next integration interval in a cyclical fashion. An increase of the resolution in the vertical direction will then result by reading out the video signals from the semiconductor image sensor. The horizontal image shift is produced in the optical path between the objective lens of the image sensor by means of filter disk mounted so as to be bistable. The filter disk can thereby be flipped through a predetermined angle and back between integration intervals of the image sensor.