Patents by Inventor Marc-Henri Marticou

Marc-Henri Marticou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for producing cathodes for cathodic sputtering based on aluminium-silicon alloys
    Patent number: 5160388
    Abstract: The invention relates to a process for the production of targets to be used in the vacuum deposition of aluminium alloy by cathodic sputtering.The process consists of a heat treatment of the aluminium alloy disks making it possible to obtain a fine grain. It is characterized by the dissolving of the silicon, followed by controlled cooling bringing about the fine precipitation of the silicon and an optional silicon spheroidization treatment. After cooling, the disks are deformed with the press and undergo a final recrystallization treatment.The process is applied to the production of targets or cathodes for the coating of semiconductor silicon wafers by cathodic sputtering.
    Type: Grant
    Filed: July 9, 1991
    Date of Patent: November 3, 1992
    Assignee: Aluminium Pechiney
    Inventors: Jean-Marc Legresy, Marc-Henri Marticou