Abstract: An an optical system for microlithography, such as a projection lens, comprises: an optical element; a manipulator for moving the optical element; and at least one sensor for detecting a movement of the optical element, such as for detecting a position of the optical element. The sensor is mounted on a sensor adapter having a sensor housing, which is installed in the optical system via a releasable connection. A sensor adapter for an optical system for microlithography, such as an optical system, comprises: a sensor for detecting a movement of an optical element, such as for detecting a position of an optical element; and a sensor housing, which is designed for installation in the optical system via a releasable connection.

Abstract: A film transducer has a holding part, an electroactive composite structure which includes at least one deformable carrier and at least two electrodes arranged on opposite sides of the deformable carrier, and a load application member which is mounted to the composite structure. The holding part engages two ends of the composite structure facing away from each other and the load application member is arranged between the two ends of the composite structure.