Abstract: Use of heterogeneous nucleation allows the localized reduction of metal salt and also cross-link the carbon precursor in the same region. This cross-linked matrix act as the secondary heterogeneous sites for spontaneous Nano particle synthesis and growth during the process of pyrolysis. Selectively creating heterogeneous sites and reducing the metal precursor using highly focused energy beams create various metal-carbon composites with controlled metal positioning. This is such a unique process where a pretreatment process will control the fabrication of complex metal-carbon composite nano and microstructures. This greatly simplifies the fabrication process, facilitating nanostructures like Nano metal bulbs, nanometal pointed nanogaps and metal sandwich structures with such process. With several advantages ranging from electronics, catalysis, optics and several other bio-functionalization technologies, this enables materials with unique and hybrid advantages.

Abstract: Disclosed is a bottom-up synthesis approach for the fabrication of gold nanoparticles composite carbon thin films based on in situ reduction of gold precursor within a photoresist matrix. This provides the possibility to accumulate noble metal nanostructures both on the surface as wells as in the bulk of a tough material like glassy carbon. With several advantages ranging from electronics, catalysis, optics and several other biofuntionalization technologies, this material is like a hybrid. Moreover, fabrication of micro and Nano level structures make it as a CMEMS and BIOMEMS relevant material for wide range of applications.

Abstract: Use of heterogeneous nucleation allows the localized reduction of metal salt and also cross-link the carbon precursor in the same region. This cross-linked matrix act as the secondary heterogeneous sites for spontaneous Nano particle synthesis and growth during the process of pyrolysis. Selectively creating heterogeneous sites and reducing the metal precursor using highly focused energy beams create various metal-carbon composites with controlled metal positioning. This is such a unique process where a pretreatment process will control the fabrication of complex metal-carbon composite nano and microstructures. This greatly simplifies the fabrication process, facilitating nanostructures like Nano metal bulbs, nanometal pointed nanogaps and metal sandwich structures with such process. With several advantages ranging from electronics, catalysis, optics and several other bio-functionalization technologies, this enables materials with unique and hybrid advantages.

Abstract: Disclosed is a bottom-up synthesis approach for the fabrication of gold nanoparticles composite carbon thin films based on in situ reduction of gold precursor within a photoresist matrix. This provides the possibility to accumulate noble metal nanostructures both on the surface as wells as in the bulk of a tough material like glassy carbon. With several advantages ranging from electronics, catalysis, optics and several other biofunctionalization technologies, this material is like a hybrid. Moreover, fabrication of micro and Nano level structures make it as a CMEMS and BIOMEMS relevant material for wide range of applications.

Abstract: A method of forming three-dimensional structures includes forming a conductive layer on a substrate and patterning a resist layer over the conductive layer, the resist layer having contained therein a plurality of vias. An electrically conductive polymer is then electro-deposited in the vias. The electro-deposition operation is then stopped to form one or more of posts, posts having bulbous termini (i.e., mushrooms), or a layer atop the resist layer. The resist may be removed to yield the structure which may be further processed. For example, the structure may be pyrolyzed. In addition, biomolecules may also be adhered or otherwise affixed to the structure.

Abstract: A method of forming three-dimensional structures includes forming a conductive layer on a substrate and patterning a resist layer over the conductive layer, the resist layer having contained therein a plurality of vias. An electrically conductive polymer is then electro-deposited in the vias. The electro-deposition operation is then stopped to form one or more of posts, posts having bulbous termini (i.e., mushrooms), or a layer atop the resist layer. The resist may be removed to yield the structure which may be further processed. For example, the structure may be pyrolyzed. In addition, biomolecules may also be adhered or otherwise affixed to the structure.

Abstract: Systems and methods are provided for producing high-surface-area three-dimensional electrodes for electrochemical applications. In one embodiment, sheets of precursor material are interleaved with sheets of a sacrificial material and then bonded to a base comprising a precursor material with a precursor bonding material. The precursor sheets, base and bonding material preferably formed from the same precursor material. The bonded structure is then pyrolyzed to create a lithium intercalating structure and remove the sacrificial material. In another embodiment, a reactive-ion etching process is used to pattern 3D structures into a sheet of precursor material. The 3D structure is then converted into a lithium intercalating structure through pyrolysis. In both embodiments, the components of the structure to be heat treated preferably comprise the same lithium intercalating precursor material. As a result, micro-scale high-aspect-ratio 3D electrode features having very fine structures can be patterned and created.

Abstract: Methods for the fabrication of suspended carbon structures using a negative photoresist that is exposed to a source of UV light, and a two step pyrolysis process. Ebeam lithography is used to define the suspended structures. The fabrication method described herein provides a novel carbon microfabrication technique, which has potential applications in carbon based electronics, sensors, batteries, microfluidics, etc.

Abstract: Methods for the fabrication of suspended carbon structures using a negative photoresist that is exposed to a source of UV light, and a two step pyrolysis process. Ebeam lithography is used to define the suspended structures. The fabrication method described herein provides a novel carbon microfabrication technique, which has potential applications in carbon based electronics, sensors, batteries, microfluidics, etc.

Abstract: C-MEMS architecture having carbon structures with high surface areas due to high aspect ratios and nanoscale surface enhancements, and improved systems and methods for producing such structures are provided. Specifically, high aspect ratio carbon structures are microfabricated by pyrolyzing a patterned carbon precursor polymer. Pyrolysing the polymer preferably comprises a multi-step process in an atmosphere of inert and forming gas at high temperatures that trail the glass transition temperature (Tg) for the polymer. The surface area of the carbon microstructures is increases by nanotexturing the surface through oxygen plasma exposure, and by integrating nanoscale structures with the carbon microstructures by exposing the carbon microstructures and a catalyst to hydrocarbon gas. In a preferred embodiment, the carbon microstructures are the source of carbon gas.

Abstract: A novel artificial muscle material and miniature valves and micropumps made therefrom are provided. The artificial muscle material bends reversibly when electroactuated by applying low voltage, in a wide pH range, even at that of physiological pH, and works without contact with electrodes. Miniature valves made from the artificial material are successfully triggered for the fluid release in a wide pH range, even at that of physiological pH. Novel fluid release devices were manufactured using this artificial muscle, and methods using the same were provided, including an implantable device optimized for trans-scleral drug delivery.

Abstract: A microfluidic switching device includes a planar substrate having a central axis of rotation and a radially-oriented microchannel disposed in the planar substrate that terminates at a junction. In one aspect, the junction is formed as a double-layered junction in which an upstream portion is vertically offset from a downstream portion. In addition, the upstream portion has a smaller effective center of cross-sectional area than the downstream portion. First and rotation second outlet chambers are coupled at one end to the junction. The device is rotated about the central axis in a clockwise direction so as to cause the fluid in the reservoir to flow into the first (right) outlet chamber or in a counter-clockwise direction so as to cause the fluid in the reservoir to flow into the second (left) outlet chamber.

Abstract: Systems and methods are provided for producing high-surface-area three-dimensional electrodes for electrochemical applications. In one embodiment, sheets of precursor material are interleaved with sheets of a sacrificial material and then bonded to a base comprising a precursor material with a precursor bonding material. The precursor sheets, base and bonding material preferably formed from the same precursor material. The bonded structure is then pyrolyzed to create a lithium intercalating structure and remove the sacrificial material. In another embodiment, a reactive-ion etching process is used to pattern 3D structures into a sheet of precursor material. The 3D structure is then converted into a lithium intercalating structure through pyrolysis. In both embodiments, the components of the structure to be heat treated preferably comprise the same lithium intercalating precursor materail. As a result, micro-scale high-aspect-ratio 3D electrode features having very fine structures can be patterned and created.

Abstract: A microfluidic device for the splitting or sequencing of fluid flow includes a plurality of upstream and/or downstream chambers coupled via microfluidic channels. For splitting fluid, a substrate is provided that includes a main chamber and a plurality of downstream sub-chambers. Each sub-chamber is associated with a sealable vent hole. Fluid is selectively moved into the desired sub-chamber of interest by unsealing its associated vent hole. Fluid is then pumped into the sub-chamber, for example, by rotating the substrate. For flow sequencing, a substrate is provided that includes a plurality of upstream chambers coupled to at least one downstream chamber. Each upstream chamber has an associated vent hole that can be selectively opened. The substrate is then rotated and fluid contained in the upstream chamber with the valve in the unsealed state will then pass to the at least one downstream chamber.

Abstract: A conductive oxide solid formed through an electrochemical process. The resulting solid predominantly contains oxides of the highest oxidation state. Additionally, the solid can be thick, uniform, stable across a wide range of acidity and temperature, fully hydrated, and conductive with a very low redox potential. A preferred embodiment is an iridium solid formed at high temperature in molten carbonate, said solid containing intercalated lithium. The solid has application as an electrode with reduced drift. An electrochemical acidity sensor is disclosed which pairs an electrode bearing the solid with a reference electrode. Additionally, sensor apparatuses for measuring carbon dioxide and other materials as well as methods for measuring materials using an embedded acidity sensor are disclosed.

Abstract: An electrochemical microsensor package comprises a substrate matrix having a upper non-conductive layer and an adjacent lower non-conductive layer with a conductive trace or pad extending over an area therebetween. The conductive pad has integral therewith a projecting contact button that projects through and below the second non-conductive for making contact with external electrical contacts. A sensor electrode is positioned on the surface of the conductive pad toward the upper non-conductive layer and in electrical contact therewith. A well extends through the upper non-conductive layer to the upper surface of the electrode. The microsensor packages may be produced by electrodeposition of the conductive pad onto a conductive mandrel having depressions to form the contact button.

Abstract: A novel artificial muscle material and miniature valves and micropumps made therefrom are provided. The artificial muscle material bends reversibly when electroactuated by applying low voltage, in a wide pH range, even at that of physiological pH, and works without contact with electrodes. Miniature valves made from the artificial material are successfully triggered for the fluid release in a wide pH range, even at that of physiological pH. Novel fluid release devices were manufactured using this artificial muscle, and methods using the same were provided, including an implantable device optimized for trans-scleral drug delivery.

Abstract: Planar microfluidic devices are laminate structures having a matrix layer at an upper side laminated at an interface to a lower substrate layer. The structure has one or more cavities extending from the upper side to the interface. A membrane is laminated on the upper side of the structure thereby to form a fluid barrier for the cavities. Devices for use as electrochemical sensors further include an electrode at the laminate structure interface below the matrix layer cavity and a well through the substrate layer below the electrode for electrical communication.

Abstract: A micro-machined drug delivery device and method of use for the delivery of labile drugs is disclosed. A micro-machined sensing device and method of use is also disclosed. A micro-machined drug delivery and sensing device and method of use is additionally disclosed. All three devices are intended to be inserted into a patient's body. The drug delivery devices allow for the mixing of drug components prior to the release of the mixture into the patient's body where the mixture is labile. The micro-machined sensing device is suitable for monitoring the concentration of a specific chemical in a patient's body fluids when the monitoring requires a labile reagent that must be mixed prior to introduction of the body fluid into the sensing device. The micro-machined drug delivery and sensing device is especially applicable in situations where the prompt delivery of labile drugs is necessary.

Abstract: An electrochemical microsensor package comprises a substrate matrix having a upper non-conductive layer and an adjacent lower non-conductive layer with a conductive trace or pad extending over an area therebetween. The conductive pad has integral therewith a projecting contact button that projects through and below the second non-conductive for making contact with external electrical contacts. A sensor electrode is positioned on the surface of the conductive pad toward the upper non-conductive layer and in electrical contact therewith. A well extends through the upper non-conductive layer to the upper surface of the electrode. The microsensor packages may be produced by electrodeposition of the conductive pad onto a conductive mandrel having depressions to form the contact button.