Patents by Inventor Marc KOLLRACK

Marc KOLLRACK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SHOWERHEAD TEMPERATURE BASED DEPOSITION TIME COMPENSATION FOR THICKNESS TRENDING IN PECVD DEPOSITION SYSTEM
    Publication number: 20240344201
    Abstract: A controller for a processing chamber configured to perform a deposition process on a substrate comprises a temperature monitor configured to obtain a temperature of a showerhead of the processing chamber, a deposition time determiner configured to determine an optimized deposition time based on the obtained temperature of the showerhead and data that correlates the temperature of the showerhead with at least one of the optimized deposition time, a deposition thickness, and a deposition rate, and a deposition optimizer configured to perform a deposition step on the substrate based on the determined optimized deposition time.
    Type: Application
    Filed: July 15, 2022
    Publication date: October 17, 2024
    Inventors: Dong WANG, Tu HONG, Wenija SHEIN, Hu KANG, Marc KOLLRACK, Sky MULLENAUX