Patents by Inventor Marc M. Faktor, deceased

Marc M. Faktor, deceased has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Precursors for metal fluoride deposition and use thereof
    Patent number: 5250740
    Abstract: A method for forming a layer of a Group II or III fluoride on a semiconductor substrate (e.g. as epitaxial insulating layer) comprising vaporising a precursor (I), where M is Be, Ca, Sr, Ba or lanthanide, b and d are 0 or 1. A, B, C and D are independently (IIA) or (IIB), X being O, S, NR, PR where R is H, alkyl, perfluoroalkyl; Y is perfluoroalkyl, fluoroalkenyl, fluoroalkylamine or fluoroalkenylamine; Z is H, F, alkyl, perfluoroalkyl or perfluoroalkenyl; and then decomposing the precursor vapor to form M fluoride. A preferred precursor for CaF.sub.2 is a calcium 1,1,1,5,5,5-hexafluor-2,4-pentanedione complex where b and d are 0.
    Type: Grant
    Filed: January 9, 1992
    Date of Patent: October 5, 1993
    Assignee: The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and Northern Ireland
    Inventors: Kevin J. Mackey, Anthony W. Vere, Donald C. Bradley, Daro M. Frigo, Marc M. Faktor, deceased
  • Method of depositing metal fluoride
    Patent number: 5116785
    Abstract: A method for forming a layer of a Group II or III fluoride on a semiconductor substrate (e.g. as epitaxial insulating layer) comprising vaporizing a precursor (I), where M is Be, Ca, Sr, Ba or lanthanide, b and d are 0 or 1. A, B, C and D are independently (IIA) or (IIB), X being O, S, NR, PR where R is H, alkyl, perfluoroalkyl; Y is perfluoroalkyl, fluoroalkenyl, fluoroalkylamine or fluoroalkenylamine; Z is H, F, alkyl, perfluoroalkyl or perfluoroalkenyl; and then decomposing the precursor vapor to form M fluoride. A preferred precursor for calcium fluoride is calcium 1,1,1,5,5,5-hexafluor-2,4-pentanedione complex where b and d are 0.
    Type: Grant
    Filed: November 30, 1990
    Date of Patent: May 26, 1992
    Assignee: The Secretary of State for Defence in her Britannic Majesty's Government of The United Kingdom of Great Britian and Northern Ireland
    Inventors: Kevin J. Mackey, Anthony W. Vere, Donald C. Bradley, Dario M. Frigo, Marc M. Faktor, deceased