Patents by Inventor Marc PORTAIL

Marc PORTAIL has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for fabricating a micromechanical structure made of silicon carbide including at least one cavity
    Patent number: 10472230
    Abstract: A process for fabricating a micromechanical structure made of silicon carbide including a cavity, from a stack including a first silicon-carbide layer and a silicon layer on the first silicon-carbide layer, the process including shaping the silicon layer so as to form a discrete silicon structure on the first silicon-carbide layer. The process further includes, after the shaping of the silicon layer, a carbonization to initiate the removal of the discrete silicon structure; depositing a second silicon-carbide layer; and an annealing step, the discrete silicon structure being entirely removed at the end of the annealing.
    Type: Grant
    Filed: April 6, 2017
    Date of Patent: November 12, 2019
    Assignees: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS), UNIVERSITÉ DE TOURS
    Inventors: Daniel Alquier, Rami Khazaka, Jean François Michaud, Marc Portail
  • PROCESS FOR FABRICATING A MICROMECHANICAL STRUCTURE MADE OF SILICON CARBIDE INCLUDING AT LEAST ONE CAVITY
    Publication number: 20190152772
    Abstract: A process for fabricating a micromechanical structure made of silicon carbide including a cavity, from a stack including a first silicon-carbide layer and a silicon layer on the first silicon-carbide layer, the process including shaping the silicon layer so as to form a discrete silicon structure on the first silicon-carbide layer. The process further includes, after the shaping of the silicon layer, a carbonization to initiate the removal of the discrete silicon structure; depositing a second silicon-carbide layer; and an annealing step, the discrete silicon structure being entirely removed at the end of the annealing.
    Type: Application
    Filed: April 6, 2017
    Publication date: May 23, 2019
    Inventors: Daniel ALQUIER, Rami KHAZAKA, Jean François MICHAUD, Marc PORTAIL