Abstract: A method for separating a workpiece along a separation line by using laser pulses of a laser beam includes splitting the laser beam into a plurality of partial laser beams using a beam splitter optical unit, focusing the plurality of partial laser beams onto a surface of the workpiece and/or into a volume of the workpiece using a focusing optical unit, so that the plurality of partial laser beams are arranged next to one another and spaced apart from one another along the separation line, and ablating material of the workpiece along the separation line by introducing the laser pulses of the plurality of partial laser beams into the workpiece. The laser power per partial laser beam is adjusted depending on an ablation depth obtained in the workpiece.

Abstract: A method for machining a material using a pulsed laser includes introducing a sequence of laser pulses into the material for machining the material, and synchronizing a start of each sequence with a fundamental frequency of the laser. The sequence of laser pulses comprises at least two different sequence elements that are offset from one another in space and time. Each sequence element comprises an individual laser pulse, a specific succession of individual laser pulses, or a burst of laser pulses. Specific sequence element properties are impressed on each sequence element. The sequence element properties comprise a position of the laser focus of a respective sequence element. The position of the laser focus of each sequence element of the sequence is adapted for each sequence element.

Abstract: A method for producing at least one optically usable microstructure, in particular at least one waveguide structure, on an optical crystal is provided. The method includes irradiating a pulsed laser beam onto a surface of the optical crystal, moving the pulsed laser beam and the optical crystal relative to one another along a feed direction in order to remove material of the optical crystal along at least one ablation path in order to form the optically usable microstructure. The pulsed laser beam is irradiated onto the surface of the optical crystal with pulse durations of less than 5 ps, preferably less than 850 fs, more preferably less than 500 fs, in particular less than 300 fs, and with a wavelength of less than 570 nm, preferably less than 380 nm.