Abstract: A force sensor including a support, a test body, two strain gauges, mechanical transmission means between the test body and the strain gauges so that a movement of the test body applies a strain onto the strain gauges in a first direction of the plane of the sensor, the transmission means being hinged relative to the support about a second direction in the plane of the sensor, the test body being accommodated within a first volume, the strain gauges being accommodated within a second volume, insulated by sealed insulation means. The sensor includes a sacrificial layer, a nanometric layer, a protective layer and a micrometric layer. The test body and at least one portion of the support are formed in the substrate, the sealed insulation means are partially formed by the nanometric layer and by the sacrificial layer, and the strain gauges are formed in the nanometric layer.

Abstract: A resonant sensor including a support, a proof body suspended from the support and having a resonant frequency ?a, an element that measures a force including at least one resonator of resonant frequency ?rn, the force being applied by the proof body, and a mechanical decoupling structure interposed between the proof body and the resonator. The decoupling structure includes a decoupling mass, a first connecting element between the decoupling mass and the proof body, a second connecting element between the decoupling mass and the resonator, the decoupling structure having a main vibration mode whose resonant frequency ?d is such that ?a<?d<?rn, the decoupling structure forming a mechanical low-pass filter between the proof body and the resonator.

Abstract: An opto-mechanical structure includes a substrate extending along a plane; a support element arranged on the substrate; a conductive element adapted to create an electric field oriented perpendicularly to the plane of the substrate; and an opto-mechanical resonator. The opto-mechanical resonator includes a mechanically movable element made of a piezoelectric material and arranged on the support element, the piezoelectric material being chosen so that the electric field created by the conductive element when the same is subjected to an electric potential causes a displacement of the movable element; an optical resonator coupled to the movable element. The conductive element is located above or below the movable element, at a non-zero distance from the movable element, the conductive element and the movable element having a surface facing each other.

Abstract: A passive wireless electronic component (2) including at least one antenna (14), the or each antenna having an associated antenna frequency, and comprising at least one resonant micro-electromechanical component having a resonant frequency and connected to a contact point of said antenna, forming an antenna-resonator assembly suitable for receiving an incident electromagnetic signal (Sl) including at least two frequencies and for transmitting a backscattered electromagnetic signal (Sr). The passive wireless electronic component (2) is such that the or each antenna (14) includes at least two non-linearly actuated resonant micro-electromechanical MEMS components (16, 18), each of said MEMS components having a natural mechanical resonant frequency thereof within a resonant frequency range, the resonant frequency ranges associated with two distinct MEMS components being disjointed.

Abstract: The present description concerns a microelectromechanical sensor control method, including the steps of: exciting, with same first signal (FSL), a first resonant (206L) and at least one second resonant element (206R); and estimating a phase shift (??) between the first signal and a second signal (FSR) which is an image of vibrations of the second resonant element.

Abstract: A detecting device configured to detect chemical or biological species in a given environment, includes a matrix-array sensor formed from opto-mechanical discs that are optically and mechanically resonant, able to bind to species of the environment, and arranged in rows and columns. The opto-mechanical discs of a given row are optically coupled to the same optical waveguide. Actuating electrodes are provided in order to ensure the mechanical resonance of the opto-mechanical discs. One p-n junction is associated with each opto-mechanical disc, the junctions of a given column being electrically connected to the same biasing electrode, so as to block the flow through the corresponding opto-mechanical disc of a parasitic electrical current.

Abstract: A force sensor including a support, a test body, two strain gauges, mechanical transmission means between the test body and the strain gauges so that a movement of the test body applies a strain onto the strain gauges in a first direction of the plane of the sensor, the transmission means being hinged relative to the support about a second direction in the plane of the sensor, the test body being accommodated within a first volume, the strain gauges being accommodated within a second volume, insulated by sealed insulation means. The sensor includes a sacrificial layer, a nanometric layer, a protective layer and a micrometric layer. The test body and at least one portion of the support are formed in the substrate, the sealed insulation means are partially formed by the nanometric layer and by the sacrificial layer, and the strain gauges are formed in the nanometric layer.

Abstract: A detecting device configured to detect chemical or biological species in a given environment, includes a matrix-array sensor formed from opto-mechanical discs that are optically and mechanically resonant, able to bind to species of the environment, and arranged in rows and columns. The opto-mechanical discs of a given row are optically coupled to the same optical waveguide. Actuating electrodes are provided in order to ensure the mechanical resonance of the opto-mechanical discs. One p-n junction is associated with each opto-mechanical disc, the junctions of a given column being electrically connected to the same biasing electrode, so as to block the flow through the corresponding opto-mechanical disc of a parasitic electrical current.

Abstract: A resonant sensor including a support, a proof body suspended from the support and having a resonant frequency ?a, means for measuring a force including at least one resonator of resonant frequency ?rn, said force being applied by the proof body, and a mechanical decoupling structure interposed between the proof body and the resonator, said decoupling structure including a decoupling mass, a first connecting element between the decoupling mass and the proof body, a second connecting element between the decoupling mass and the resonator, the decoupling structure having a main vibration mode whose resonant frequency ?d is such that ?a <?d< ?rn, said decoupling structure forming a mechanical low-pass filter between the proof body and the resonator. FIG.

Abstract: The present description concerns a clock signal generation device (902) comprising: a microelectromechanical resonant element (504); and at least one nanoelectromechanical transduction element (512).

Abstract: A sensor for sensing the concentration of at least one biological species in blood includes a support, at least one waveguide, and an optomechanical resonator hanging to the support. The optomechanical resonator is optically coupled to the waveguide. The optomechanical resonator is configured to vibrate in a volume mode and includes at least one face extending in the plane of the sensor and is configured to receive molecules of the given species. The optical resonator includes a body comprising an optical active area and an optical insulation layer deposited at least in line with the optical active area so as to confine at least partially an electromagnetic wave in the body.

Abstract: The present description concerns a microelectromechanical sensor control method, including the steps of: exciting, with same first signal (FSL), a first resonant (206L) and at least one second resonant element (206R); and estimating a phase shift (??) between the first signal and a second signal (FSR) which is an image of vibrations of the second resonant element.

Abstract: Microelectromechanical accelerometer comprising a support (2) and a mobile portion (4) able to be vibrated, means for measuring (10) the amplitude of the vibration of said mobile portion (4) in at least one detection direction of the plane of the accelerometer. The accelerometer comprises at least one foot (6) anchored on the support (2) by a first end and fixed to the mobile portion (4) by a second end, and allowing the mobile portion (4) to vibrate at least along said at least one detection direction under the effect of an acceleration force.

Abstract: Particle detection device comprising a support, a platform for receiving particles, four beams suspending the platform from the support, such that the platform can be made to vibrate, means for making said platform vibrate at a resonance frequency, means for detecting the displacement of the platform in a direction of displacement. Each beam has a length l, a width L and a thickness e and the platform has a dimension in the direction of displacement of the platform and in which in a device with out of plane mode l?10×L and the dimension of each beam in the direction of displacement of the platform is at least 10 times smaller than the dimension of the platform in the direction of displacement.

Abstract: A resonating measurement system having at least a microelectromechanical system (MEMS) and/or nanoelectromechanical system (NEMS) is provided, including an optomechanical device comprising at least one resonating element at at least one resonance frequency of fr, and at least one optical element having an optical index sensitive to displacement of the at least one resonating elementl; excitation circuitry configured to excite the at least one resonating element at at least at one operating frequency of fm; an injection device configured to inject a light beam, having an intensity modulated at frequency of f1=fm+?f, in the optomechanical device; and a photodetection device configured to measure an intensity of a light beam transmitted from the optomechanical device, the intensity having at least one component at frequency of ?f.

Abstract: A method of characterizing frequency fluctuations of a resonator comprising the steps of: a) driving the resonator, in a linear regime, by simultaneously applying two periodical driving signals having respective frequencies, the frequencies being different from each other and from a resonant frequency of the resonator, but contained within a resonance linewidth thereof; b) performing simultaneous measurements of response signal of the resonator at the frequencies of the periodical driving signal; and c) computing a value representative of a correlation between the measurements, the value being indicative of frequency fluctuations of the resonator. An apparatus for implementing such a method is provided.

Abstract: Particle detection device comprising a support, a platform for receiving particles, four beams suspending the platform from the support, such that the platform can be made to vibrate, means for making said platform vibrate at a resonance frequency, means for detecting the displacement of the platform in a direction of displacement. Each beam has a length I, a width L and a thickness e and the platform has a dimension in the direction of displacement of the platform and in which in a device with out of plane mode I?10×L and the dimension of each beam in the direction of displacement of the platform is at least 10 times smaller than the dimension of the platform in the direction of displacement.

Abstract: A method of characterizing frequency fluctuations of a resonator comprising the steps of: a) driving the resonator, in a linear regime, by simultaneously applying two periodical driving signals having respective frequencies, the frequencies being different from each other and from a resonant frequency of the resonator, but contained within a resonance linewidth thereof; b) performing simultaneous measurements of response signal of the resonator at the frequencies of the periodical driving signal; and c) computing a value representative of a correlation between the measurements, the value being indicative of frequency fluctuations of the resonator. An apparatus for implementing such a method is provided.

Abstract: Resonator measurement system having at least MEMS and/or NEMS, comprising: an optomechanical device comprising at least one resonating element at at least one resonance frequency of fr and at least one optical element whose optical index is sensitive to the displacement of the resonating element, excitation circuitry of exciting the resonating element at least at one operating frequency of fm, injection device for injecting a light beam whose intensity is modulated at frequency f1=fm+?f in the optomechanical device, a photodetection device configured measure the intensity of a light beam coming out of the optomechanical device, the intensity of the measurement beam having at least one component at frequency ?f.