Patents by Inventor Marc Segers

Marc Segers has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for treating an object with plasma
    Patent number: 11075057
    Abstract: A system for treating an object with plasma includes a vacuum processing chamber having a holder on which the object to be treated is placed, at least two subassemblies each including at least one plasma source able to generate a plasma and being supplied with radio-frequency power Pi and with a gas i of independent flow rate ni. The plasma generated by one of the subassemblies is a partially ionized gas or gas mixture of different chemical nature from the plasma generated by the other subassembly or subassemblies. A process for selectively treating a composite object employing such a device is described.
    Type: Grant
    Filed: January 13, 2018
    Date of Patent: July 27, 2021
    Assignee: Plasma-Therm LLC
    Inventors: Gilles Baujon, Emmanuel Guidotti, Yannick Pilloux, Patrick Rabinzohn, Julien Richard, Marc Segers, Vincent Girault
  • Device for Treating an Object with Plasma
    Publication number: 20180158651
    Abstract: A system for treating an object with plasma includes a vacuum processing chamber having a holder on which the object to be treated is placed, at least two subassemblies each including at least one plasma source able to generate a plasma and being supplied with radio-frequency power Pi and with a gas i of independent flow rate ni. The plasma generated by one of the subassemblies is a partially ionized gas or gas mixture of different chemical nature from the plasma generated by the other subassembly or subassemblies. A process for selectively treating a composite object employing such a device is described.
    Type: Application
    Filed: January 13, 2018
    Publication date: June 7, 2018
    Applicant: Plasma-Therm, LLC
    Inventors: Gilles Baujon, Emmanuel Guidotti, Yannick Pilloux, Patrick Rabinzohn, Julien Richard, Marc Segers, Vincent Girault
  • Device for Treating an Object with Plasma
    Publication number: 20150243485
    Abstract: A system for treating an object with plasma includes a vacuum processing chamber having a holder on which the object to be treated is placed, at least two subassemblies each including at least one plasma source able to generate a plasma and being supplied with radio-frequency power Pi and with a gas i of independent flow rate ni. The plasma generated by one of the subassemblies is a partially ionized gas or gas mixture of different chemical nature from the plasma generated by the other subassembly or subassemblies. A process for selectively treating a composite object employing such a device is described.
    Type: Application
    Filed: July 22, 2013
    Publication date: August 27, 2015
    Applicant: Nanoplas
    Inventors: Gilles Baujon, Emmanuel Guidotti, Yannick Pilloux, Patrick Rabinzohn, Julien Richard, Marc Segers, Vincent Girault
  • Method and device for generating extreme ultravilolet radiation in particular for lithography
    Publication number: 20040129896
    Abstract: Method and device for generating light in the extreme ultraviolet, notably for lithography.
    Type: Application
    Filed: October 10, 2003
    Publication date: July 8, 2004
    Inventors: Martin Schmidt, Olivier Sublemontier, Tiberio Ceccotti, Marc Segers