Patents by Inventor Marc Waelti

Marc Waelti has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6989921
    Abstract: An array of magnetically actuated MEMS mirror devices is provided having stationary magnets configured to provide strong magnetic fields in the plane of the mirrors without any magnets or magnet-system components in the plane of the mirrors. Also, a magnetically actuated mirror device is provided that includes an improved actuation coil configuration that provides greater torque during mirror actuation. In addition, a mechanism is provided to detect the angular deflection of a moveable mirror. Also, an improved process is provided for manufacturing MEMS mirror devices.
    Type: Grant
    Filed: August 24, 2001
    Date of Patent: January 24, 2006
    Assignee: Corning Incorporated
    Inventors: Jonathan Bernstein, William P. Taylor, Gregory A. Kirkos, Marc Waelti
  • Patent number: 6912078
    Abstract: One embodiment is directed to a gimbal mechanism for a MEMS mirror device having folded flexure hinges. Another embodiment is directed to a gimbal mechanism having a frame with through-holes or recesses distributed thereabout to reduce weight of said frame. Other embodiments are directed to improved electrode structures for electrostatically actuated MEMS devices. Other embodiments are directed to methods for fabricating electrodes for electrostatically actuated MEMS devices. Other embodiments are directed to methods of fabricating through-wafer interconnect devices. Other embodiments are directed to MEMS mirror array packaging. Other embodiments are directed to electrostatically actuated MEMS devices having driver circuits integrated therewith. Other embodiments are directed to methods of patterning wafers with a plurality of through-holes. Other embodiments are directed to methods of forming moveable structures in MEMS devices.
    Type: Grant
    Filed: March 15, 2002
    Date of Patent: June 28, 2005
    Assignee: Corning Incorporated
    Inventors: Thomas David Kudrle, Carlos Horacio Mastrangelo, Marc Waelti, ChuanChe Wang, Gordon M. Shedd, Gregory A. Kirkos, Mirela Gabriela Bancu, James Ching-Ming Hsiao
  • Publication number: 20040046248
    Abstract: Methods and apparatus are provided for sealing and reducing warpage in a microsystem device. The microsystem device is assembled with a substrate and packaged.
    Type: Application
    Filed: September 5, 2002
    Publication date: March 11, 2004
    Applicant: Corning Intellisense Corporation
    Inventors: Marc Waelti, Amy Catherine Bowman, William Patrick Taylor, Jin Zou
  • Publication number: 20020146200
    Abstract: One embodiment is directed to a gimbal mechanism for a MEMS mirror device having folded flexure hinges. Another embodiment is directed to a gimbal mechanism having a frame with through-holes or recesses distributed thereabout to reduce weight of said frame. Other embodiments are directed to improved electrode structures for electrostatically actuated MEMS devices. Other embodiments are directed to methods for fabricating electrodes for electrostatically actuated MEMS devices. Other embodiments are directed to methods of fabricating through-wafer interconnect devices. Other embodiments are directed to MEMS mirror array packaging. Other embodiments are directed to electrostatically actuated MEMS devices having driver circuits integrated therewith. Other embodiments are directed to methods of patterning wafers with a plurality of through-holes. Other embodiments are directed to methods of forming moveable structures in MEMS devices.
    Type: Application
    Filed: March 15, 2002
    Publication date: October 10, 2002
    Inventors: Thomas David Kudrle, Carlos Horacio Mastrangelo, Marc Waelti, ChuanChe Wang, Gordon M. Shedd, Gregory A. Kirkos, Mirela Gabriela Bancu, James Ching-Ming Hsiao
  • Publication number: 20020050744
    Abstract: An array of magnetically actuated MEMS mirror devices is provided having stationary magnets configured to provide strong magnetic fields in the plane of the mirrors without any magnets or magnet-system components in the plane of the mirrors. Also, a magnetically actuated mirror device is provided that includes an improved actuation coil configuration that provides greater torque during mirror actuation. In addition, a mechanism is provided to detect the angular deflection of a moveable mirror. Also, an improved process is provided for manufacturing MEMS mirror devices.
    Type: Application
    Filed: August 24, 2001
    Publication date: May 2, 2002
    Inventors: Jonathan Bernstein, William P. Taylor, Gregory A. Kirkos, Marc Waelti