Patents by Inventor Marcel C. M. Baggen

Marcel C. M. Baggen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5204712
    Abstract: A support device comprises a first and a second bearing unit for guiding the support device along a base surface and a straight guide extending parallel to the base surface, respectively. The support device has an object table which is coupled to a rigidification member and which is displaceable relative to the two bearing units in a z-direction transverse to the base surface and is tiltable about at least one axis of rotation directed parallel to the base surface by three force actuators. The rigidification member is coupled to the second bearing unit by a coupling member which is elastically deformable in the z-direction, and coupled to the first bearing unit via the force actuators, whereby a statically determined coupling of the rigidification member and the object table to the two bearing units is obtained. The support device is particularly suitable for displacements of an object in the sub-micron range, such as, for example, in an optical lithographic device.
    Type: Grant
    Filed: October 9, 1991
    Date of Patent: April 20, 1993
    Assignees: U.S. Philips Corp., A.S.M. Lithography B.V.
    Inventors: Adrianus G. Bouwer, Marcel C. M. Baggen, Henricus W. A. Janssen, Petrus R. Bartray, Jan Van Eijk