Patents by Inventor Marcel Chartier

Marcel Chartier has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 4172656
    Abstract: The method consists in recording at least one reference mark on each of the patterns corresponding to the various levels of the circuit at a fixed point, in recording the reference mark of the first pattern in the semiconductor plate at the same time as the first pattern and then, after each positioning of the thin plate after the chemical treatments, in centering, by displacing the thin plate relative to the pattern, the images in the plane of the following pattern of at least two reference marks situated in the different zones with the complementary reference mark carried by the following pattern to be projected, the thin plate then being aligned with the following pattern to be projected.
    Type: Grant
    Filed: April 17, 1978
    Date of Patent: October 30, 1979
    Assignee: Thomson-CSF
    Inventors: Michel Lacombat, Marcel Chartier, Georges Dubroeucq