Patents by Inventor Marcel Choudhury

Marcel Choudhury has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for the storage and use of at least one photomask for lithographic projection and method for using the device in an exposure installation
    Publication number: 20070187272
    Abstract: The invention relates to a device for the storage of at least one photomask for lithographic projection and a method for using the device in an exposure installation. A container is suitable for receiving a photomask. The container has a housing, a closable opening device situated at the container housing and serving for the entry and issuing of the photomask, and one gas inlet opening arranged to purge the photomask. The invention also relates to a method for using the device in an exposure installation.
    Type: Application
    Filed: December 22, 2006
    Publication date: August 16, 2007
    Inventors: Anja Bonness, Marcel Choudhury, Karin Eggers, Andreas Frangen, Norbert Kallis, Wolfgang Keller, Christoph Hocke, Michael Lering, Michael Roesner, Ruediger Hunger, Christoph Noelscher, Gregor Kubart