Abstract: Novel membranes for use in a lithographic apparatus are disclosed. A first membrane includes a core substrate and a metal silicate layer. The metal silicate layer is an outermost layer of the first membrane. A second membrane includes a core substrate and an yttrium silicate layer. The yttrium silicate layer may be an outermost layer of the membrane or, alternatively, the yttrium silicate layer may be disposed between the core substrate and a layer of yttrium or yttrium oxide. The first and second membranes may be provided within an EUV lithographic apparatus. For example, the membranes may form part of a pellicle. The pellicle may be suitable for use adjacent to a reticle within an EUV lithographic apparatus. The membranes may form part of a dynamic gas lock. The membranes may form part of a spectral filter.

Abstract: Intraocular pressure sensors, systems, and methods of use. Implantable intraocular pressure sensing devices that are hermetically sealed and adapted to wirelessly communicate with an external device. The implantable devices can include a hermetically sealed housing, the hermetically sealed housing including therein: an antenna in electrical communication with a rechargeable power source, the rechargeable power source in electrical communication with an ASIC, and the ASIC in electrical communication with a pressure sensor.

Abstract: Intraocular pressure sensors, systems, and methods of use. Implantable intraocular pressure sensing devices that are hermetically sealed and adapted to wirelessly communicate with an external device. The implantable devices can include a hermetically sealed housing, the hermetically sealed housing including therein: an antenna in electrical communication with a rechargeable power source, the rechargeable power source in electrical communication with an ASIC, and the ASIC in electrical communication with a pressure sensor.

Abstract: Intraocular pressure sensors, systems, and methods of use. Implantable intraocular pressure sensing devices that are hermetically sealed and adapted to wirelessly communicate with an external device. The implantable devices can include a hermetically sealed housing, the hermetically sealed housing including therein: an antenna in electrical communication with a rechargeable power source, the rechargeable power source in electrical communication with an ASIC, and the ASIC in electrical communication with a pressure sensor.