Patents by Inventor Marcel François Heertjes
Marcel François Heertjes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11454938Abstract: The invention relates to a control system comprising a controller arranged to provide an output signal on the basis of an input signal. The controller comprises a linear integrator, a linear gain and a selector. The linear integrator is arranged to provide a first control signal. The linear gain is in parallel to the linear integrator and is arranged to provide a second control signal. The selector is arranged to switch between an integrator mode in which the first control signal is used as the output signal of the controller and a gain mode in which the second control signal is used as the output signal of the controller. The selector is arranged to switch to the integrator mode when the value of the second control signal passes zero, and to switch to the gain mode when: eu<kh?1u2, wherein e is the input signal of the controller, u is the output signal of the controller, and kh is the gain of the linear gain.Type: GrantFiled: April 23, 2018Date of Patent: September 27, 2022Assignee: ASML Netherlands B.V.Inventors: Marcel François Heertjes, Daniel Andreas Deenen, Natalia Irigoyen Perdiguero, Yannick Knops
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Publication number: 20200174428Abstract: The invention relates to a control system comprising a controller arranged to provide an output signal on the basis of an input signal. The controller comprises a linear integrator, a linear gain and a selector. The linear integrator is arranged to provide a first control signal. The linear gain is in parallel to the linear integrator and is arranged to provide a second control signal. The selector is arranged to switch between an integrator mode in which the first control signal is used as the output signal of the controller and a gain mode in which the second control signal is used as the output signal of the controller. The selector is arranged to switch to the integrator mode when the value of the second control signal passes zero, and to switch to the gain mode when: eu<kh?1u2, wherein e is the input signal of the controller, u is the output signal of the controller, and kh is the gain of the linear gain.Type: ApplicationFiled: April 23, 2018Publication date: June 4, 2020Applicant: ASML Netherlands B.V.Inventors: Marcel François HEERTJES, Daniel DEENEN, Natalia IRIGOYEN PERDIGUERO, Yannick KNOPS
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Patent number: 10175587Abstract: A control device configured to determine a primary first drive signal, based on a first error signal representing a difference between desired and measured positions of a first body, for driving a positioner driving the first body; determine a primary second drive signal, based on a second error signal representing a difference between desired and measured positions of a second body, for driving a positioner driving the second body; determine, based on the second error signal, a secondary first drive signal for driving the first body positioner; determine, based on the first error signal, a secondary second drive signal for driving the second body positioner; combine the primary and secondary first drive signals and combine the primary and secondary second drive signals; and output the combined first and second drive signals to the respective positioning devices.Type: GrantFiled: November 21, 2014Date of Patent: January 8, 2019Assignee: ASML Netherlands B.V.Inventors: Hans Butler, Marcus Joseph Elisabeth Godfried Breukers, Marcel François Heertjes
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Publication number: 20160299442Abstract: A control device configured to determine a primary first drive signal, based on a first error signal representing a difference between desired and measured positions of a first body, for driving a positioner driving the first body; determine a primary second drive signal, based on a second error signal representing a difference between desired and measured positions of a second body, for driving a positioner driving the second body; determine, based on the second error signal, a secondary first drive signal for driving the first body positioner; determine, based on the first error signal, a secondary second drive signal for driving the second body positioner; combine the primary and secondary first drive signals and combine the primary and secondary second drive signals; and output the combined first and second drive signals to the respective positioning devices.Type: ApplicationFiled: November 21, 2014Publication date: October 13, 2016Applicant: ASML NETHERLANS B.V.Inventors: Hans BUTLER, Marcus Joseph Elisabeth Godfried BREUKERS, Marcel François HEERTJES
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Patent number: 8891063Abstract: A lithographic apparatus comprises an object table for receiving an object, an actuator for moving the object table and a handler for transferring the object to or from the object table. The apparatus is provided with a controller operable connected with the actuator and/or the handler. The controller is programmed and/or arranged to drive the actuator and the handler so as to provide that the object table and the handler substantially follow each other in a direction perpendicular to a transfer direction during transfer in the transfer direction of the object to or from the object table.Type: GrantFiled: December 22, 2011Date of Patent: November 18, 2014Assignee: ASML Netherlands B.V.Inventors: Marcus Joseph Elisabeth Godfried Breukers, Marcel François Heertjes, Niels Johannes Maria Bosch
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Patent number: 8825182Abstract: A position control system to control the position of a movable object, including a position measurement system configured to determine an actual position related quantity of the movable object; a set-point generator to provide a position related set-point signal of the movable object; a comparator to provide an error signal on the basis of a comparison of the actual position related quantity and the position related set-point signal, a controller to provide a control signal on the basis of the error signal, a feed-forward device to provide a feed-forward signal on the basis of the position related set-point signal, and one or more actuators to act on the movable object on the basis of the control signal and the feed-forward signal, wherein the feed-forward device includes a disturbance force correction table including estimations of disturbance forces exerted on the movable object in dependence of a position of the movable object.Type: GrantFiled: June 27, 2011Date of Patent: September 2, 2014Assignee: ASML Netherlands B.V.Inventors: Wilhelmus Franciscus Johannes Simons, Norbertus Josephus Martinus Van Den Nieuwelaar, Marcel François Heertjes, Joost Jozef Hendrik Gielis, Ferdinand Bernardus Johannus Wilhelmus Maria Hendriks
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Patent number: 8675179Abstract: A control system configured to position a control location of a movable object in two or more degrees of freedom with respect to another object, including a set-point generator, a position quantity measurement system, a controller including a single input-single output controller for each degree of freedom to control a position quantity of the control location, each controller providing a control signal in logical coordinates on the basis of the error signal; and a gain scheduling device to provide center-of-gravity control signals in center-of gravity coordinates on the basis of the control signals, wherein the gain scheduling device includes a static and a dynamic relationship between logical coordinates and center-of-gravity coordinates of the movable object.Type: GrantFiled: January 6, 2010Date of Patent: March 18, 2014Assignee: ASML Netherlands B.V.Inventors: Marcel François Heertjes, Daan Willem Theresia Hennekens
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Patent number: 8452442Abstract: A controller for a positioning device is constructed and arranged to receive a position signal indicative of a position of the positioning device, compare the position signal to a set-point signal indicative of a desired position of the positioning device to obtain an error signal, selectively modify the error signal based on the amplitude and the frequency content of the error signal to obtain a modified error signal, generate a control signal for controlling the positioning device on the basis of the modified error signal. The controller may be applied to control a positioning device in a lithographic apparatus.Type: GrantFiled: February 8, 2012Date of Patent: May 28, 2013Assignee: ASML Netherlands B.V.Inventors: Marcel François Heertjes, Wilhelmus Franciscus Johannes Simons, Dennis Andreas Petrus Hubertina Houben, Jeffrey Hendrikus Peter Maria Goossens
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Patent number: 8373849Abstract: A control system to control a position quantity of a movable object in dependency of signals provided by a sensor representing an actual position quantity of the moveable object, the control system being configured to provide a drive signal to an actuator which is able to apply forces to the moveable object, the control system including a set-point generator to provide a reference signal; a subtractor to provide an error signal, the error signal being the difference between the reference signal and the signals provided by the sensor; a control unit to provide a drive signal to the actuator in dependency of the error signal, wherein the control unit comprises a nonlinear controller to improve a low-frequency disturbance suppression, and wherein the control unit further includes a compensator to at least partially compensate the deterioration of the high-frequency behavior caused by the nonlinear controller.Type: GrantFiled: October 16, 2009Date of Patent: February 12, 2013Assignee: ASML Netherlands B.V.Inventor: Marcel François Heertjes
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Patent number: 8279407Abstract: A stage system includes a movable stage, at least two encoder heads each constructed to provide an encoder signal representative of a position of the movable stage with respect to an encoder target structure, and a controller to control a position of the stage. The controller is provided with the encoder signals of each of the encoder heads. The controller is arranged to apply a weighting function to the encoder signals and to derive a position of the stage from the weighted encoder signals.Type: GrantFiled: March 23, 2009Date of Patent: October 2, 2012Assignee: ASML Netherlands B.V.Inventors: Ramidin Izair Kamidi, Henrikus Herman Marie Cox, Emiel Jozef Melanie Eussen, Ronald Casper Kunst, Engelbertus Antonius Fransiscus Van Der Pasch, Marcel François Heertjes, Mark Constant Johannes Baggen
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Publication number: 20120188528Abstract: A lithographic apparatus comprises an object table for receiving an object, an actuator for moving the object table and a handler for transferring the object to or from the object table. The apparatus is provided with a controller operable connected with the actuator and/or the handler. The controller is programmed and/or arranged to drive the actuator and the handler so as to provide that the object table and the handler substantially follow each other in a direction perpendicular to a transfer direction during transfer in the transfer direction of the object to or from the object table.Type: ApplicationFiled: December 22, 2011Publication date: July 26, 2012Applicant: ASML Netherlands B.V.Inventors: Marcus Joseph Elisabeth Godfried BREUKERS, Marcel François HEERTJES, Niels Johannes Maria BOSCH
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Publication number: 20120143367Abstract: A controller for a positioning device is constructed and arranged to receive a position signal indicative of a position of the positioning device, compare the position signal to a set-point signal indicative of a desired position of the positioning device to obtain an error signal, selectively modify the error signal based on the amplitude and the frequency content of the error signal to obtain a modified error signal, generate a control signal for controlling the positioning device on the basis of the modified error signal. The controller may be applied to control a positioning device in a lithographic apparatus.Type: ApplicationFiled: February 8, 2012Publication date: June 7, 2012Applicant: ASML NETHERLANDS B.V.Inventors: Marcel Francois HEERTJES, Wilhelmus Franciscus Johanne SIMONS, Dennis, Andreas Petrus Hubertina HOUBEN, Jeffrey Hendrikus Peter Maria GOOSSENS
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Patent number: 8135488Abstract: A controller for a positioning device is constructed and arranged to receive a position signal indicative of a position of the positioning device, compare the position signal to a set-point signal indicative of a desired position of the positioning device to obtain an error signal, selectively modify the error signal based on the amplitude and the frequency content of the error signal to obtain a modified error signal, generate a control signal for controlling the positioning device on the basis of the modified error signal. The controller may be applied to control a positioning device in a lithographic apparatus.Type: GrantFiled: December 10, 2008Date of Patent: March 13, 2012Assignee: ASML Netherlands B.V.Inventors: Marcel François Heertjes, Wilhelmus Franciscus Johannes Simons, Dennis Andreas Petrus Hubertina Houben, Jeffrey Hendrikus Peter Maria Goossens
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Publication number: 20120019801Abstract: A position control system to control the position of a movable object, including a position measurement system configured to determine an actual position related quantity of the movable object; a set-point generator to provide a position related set-point signal of the movable object; a comparator to provide an error signal on the basis of a comparison of the actual position related quantity and the position related set-point signal, a controller to provide a control signal on the basis of the error signal, a feed-forward device to provide a feed-forward signal on the basis of the position related set-point signal, and one or more actuators to act on the movable object on the basis of the control signal and the feed-forward signal, wherein the feed-forward device includes a disturbance force correction table including estimations of disturbance forces exerted on the movable object in dependence of a position of the movable object.Type: ApplicationFiled: June 27, 2011Publication date: January 26, 2012Applicant: ASWL Netherlands B.V.Inventors: Wilhelmus Franciscus Johannes SIMONS, Norbertus Josephus Martinus Van Den Nieuwelaar, Marcel Françoi Heertjes, Joost Jozef Hendrik Gielis, Ferdinand Bernardus Johannus Wilhelmus Maria Hendriks
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Patent number: 8014881Abstract: In a lithographic apparatus, a feedforward transfer function of a control system is determined by: a) iteratively learning a feedforward output signal of the control system by iterative learning control for a given setpoint signal; b) determining a relation between the learned feedforward output signal and the setpoint signal; and c) applying the relation as the feedforward transfer function of the control system. A learned feedforward, which has been learned for one or more specific setpoint signals only, can be adapted to provide a setpoint signal dependent feedforward output signal. The learned feedforward can be made more robust against setpoint variations.Type: GrantFiled: February 15, 2007Date of Patent: September 6, 2011Assignee: ASML Netherlands B.V.Inventors: Mark Constant Johannes Baggen, Petrus Marinus Christianus Maria Van Den Biggelaar, Yin Tim Tso, Marcel François Heertjes, Ramidin Izair Kamidi, Dennis Andreas Petrus Hubertina Houben, Constant Paul Marie Jozef Baggen, Marinus Jacobus Gerardus Van De Molengraft
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Patent number: 7818073Abstract: A method of obtaining improved feedforward data for a feedforward control system to move a component through a setpoint profile is presented. The setpoint profile includes a plurality of target states of the component each to be substantially attained at one of a corresponding sequence of target times. The method includes moving the component with the feedforward control system according to the setpoint profile using a first set of feedforward data; measuring a state of the component at a plurality of times during the movement; comparing the measured states with corresponding target states defined by the setpoint profile to obtain a set of errors; filtering the set of errors with a non-linear filter; generating improved feedforward data based on the filtered errors, the improved feedforward data being usable by the feedforward control system to move the component more accurately through the setpoint profile.Type: GrantFiled: April 20, 2006Date of Patent: October 19, 2010Assignees: ASML Netherlands B.V., Koninklijke Philips Electronics N.V.Inventor: Marcel François Heertjes
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Patent number: 7817243Abstract: A vibration isolation system isolates a body from its surroundings with respect to vibrations. The vibration isolation system includes active isolator devices that isolate and damp the body in unstable directions. However, such active isolators may exert damping forces not only in the unstable direction, but simultaneously in other stable directions due to mechanical coupling of the stable and unstable directions. As a result the damping and isolation in the other stable directions may be deteriorated due to the active isolation and damping. Employing modal decoupling, i.e. decomposing any vibration into independent directions, and isolating and damping in the independent directions, enables compensation of any vibration in an unstable direction without influencing the isolation and damping performance in any other, possibly stable, direction.Type: GrantFiled: April 12, 2004Date of Patent: October 19, 2010Assignee: ASML Netherlands B.V.Inventors: Marcel François Heertjes, Jan-Gerard Cornelis Van Der Toorn
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Patent number: 7774287Abstract: A system to move a component in accordance with a setpoint profile including a plurality of target states of the component, each of the plurality of target states to be substantially attained at one of a corresponding sequence of target times, is presented. The system includes a displacement device to move the component according to the setpoint profile; a storage device containing a library of feedforward data; a signal generating part configured to identify a plurality of time segments of the setpoint profile that correspond to entries in the library of feedforward data, and access the entries in order to construct a feedforward signal; and a feedforward control system to control the operation of the displacement device by reference to the feedforward signal constructed by the signal generating part.Type: GrantFiled: March 14, 2006Date of Patent: August 10, 2010Assignee: ASML Netherlands B.V.Inventors: Marcel François Heertjes, Yin-Tim Tso, Edwin Teunis Van Donkelaar
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Publication number: 20100182585Abstract: A control system configured to position a control location of a movable object in two or more degrees of freedom with respect to another object, including a set-point generator, a position quantity measurement system, a controller including a single input-single output controller for each degree of freedom to control a position quantity of the control location, each controller providing a control signal in logical coordinates on the basis of the error signal; and a gain scheduling device to provide centre-of-gravity control signals in centre-of gravity coordinates on the basis of the control signals, wherein the gain scheduling device includes a static and a dynamic relationship between logical coordinates and centre-of-gravity coordinates of the movable object.Type: ApplicationFiled: January 6, 2010Publication date: July 22, 2010Applicant: ASML NETHERLANDS B.V.Inventors: Marcel François HEERTJES, Daan Willem Theresia Hennekens
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Publication number: 20100123890Abstract: A control system to control a position quantity of a movable object in dependency of signals provided by a sensor representing an actual position quantity of the moveable object, the control system being configured to provide a drive signal to an actuator which is able to apply forces to the moveable object, the control system including a set-point generator to provide a reference signal; a subtractor to provide an error signal, the error signal being the difference between the reference signal and the signals provided by the sensor; a control unit to provide a drive signal to the actuator in dependency of the error signal, wherein the control unit comprises a nonlinear controller to improve a low-frequency disturbance suppression, and wherein the control unit further includes a compensator to at least partially compensate the deterioration of the high-frequency behavior caused by the nonlinear controller.Type: ApplicationFiled: October 16, 2009Publication date: May 20, 2010Applicant: ASML Netherlands B.V.Inventor: Marcel Francois HEERTJES