Abstract: The disclosed techniques relate to a method for depositing at least one layer composed of an ionically bonded solid on a substrate, comprising the following steps: converting a coating material to the gas phase and depositing the coating material converted to the gas phase on the substrate. The layer is irradiated with UV/VIS light during the deposition. The disclosed techniques also relate to an apparatus for implementing the disclosed method and optical elements and devices created using the disclosed method.

Abstract: A method for aftertreating a fluoride layer for an optical element for the use in the VUV wavelength range, which method comprises irradiating the fluoride layer with UV/VUV radiation in the presence of an active fluorination agent. An optical element with a fluoride layer is aftertreated using this method. An optical arrangement has at least one such optical element.

Abstract: An optical element for reflection of radiation in the VUV wavelength region comprises a surface and a dielectric multilayer coating applied to the surface. The dielectric multilayer coating is designed for reflection, for example for broadband reflection, of radiation in the VUV wavelength region. The surface can be formed of a metallic base material having a reflectivity of 60% or less in the VUV wavelength region. The base material for reflection of radiation in the UV/VIS wavelength region can have a reflectivity at least one wavelength in the UV/VIS wavelength region of more than 50% An optical assembly for the VUV wavelength region can comprises at least one such optical element.

Abstract: A method for operating an optical system, such as in the FUV/VUV wavelength range, wherein the optical system comprises at least one reflective optical element having a metallic surface to which a metal fluoride layer is applied, and wherein the method includes irradiating the optical element with radiation, such as in the FUV/VUV wavelength range. In the method, the optical system is operated under oxidizing ambient conditions of the optical element during a first time interval, and under fluorinating ambient conditions of the optical element during a second time interval. The first time interval follows the second time interval, or the second time interval follows the first time interval. Optionally, the optical system is operated alternately under oxidizing ambient conditions of the optical element and under fluorinating ambient conditions of the optical element. The disclosure also relates to an optical system.

Abstract: The disclosed techniques relate to a method for depositing at least one layer composed of an ionically bonded solid on a substrate, comprising the following steps: converting a coating material to the gas phase and depositing the coating material converted to the gas phase on the substrate. The layer is irradiated with UV/VIS light during the deposition. The disclosed techniques also relate to an apparatus for implementing the disclosed method and optical elements and devices created using the disclosed method.