Patents by Inventor Marcel Hemerik

Marcel Hemerik has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sensor and lithographic apparatus
    Publication number: 20070152178
    Abstract: A sensor for use in a lithographic apparatus, the sensor having a liquid to prevent optical losses, especially when receiving radiation with a high NA. The liquid is fixed between two surfaces by capillary forces in an area through which radiation passes.
    Type: Application
    Filed: December 30, 2005
    Publication date: July 5, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Rob Adrianus Bastiaensen, Marcel Hemerik, Marcus Van De Kerkhof, Jeroen Maria Mertens, Jacob Sonneveld