Patents by Inventor Marcel J. E. H. Muitjens

Marcel J. E. H. Muitjens has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic projection apparatus having a temperature controlled heat shield
    Patent number: 6509951
    Abstract: In a lithographic projection apparatus a first part is shielded from a second part by a heat shield. The first part is required to have a temperature of a predetermined value and the second part has a characteristic that may influence the temperature of the first part. The characteristic may be a temperature deviating from the predetermined value, or a supply of radiation that may deviate the temperature of the first part from the predetermined value when incident on the first part. Heat shield temperature controlling means are provided to control a temperature of the heat shield to the predetermined value.
    Type: Grant
    Filed: February 7, 2001
    Date of Patent: January 21, 2003
    Assignee: ASML Netherlands B.V.
    Inventors: Erik R. Loopstra, Yim Bun P. Kwan, Marcel J. E. H. Muitjens, Sonja T. De Vrieze-Voorn
  • Lithographic projection apparatus having a temperature controlled heat shield
    Publication number: 20010013925
    Abstract: In a lithographic projection apparatus a first part is shielded from a second part by a heat shield. The first part is required to have a temperature of a predetermined value and the second part has a characteristic that may influence the temperature of the first part. The characteristic may be a temperature deviating from the predetermined value, or a supply of radiation that may deviate the temperature of the first part from the predetermined value when incident on the first part. Heat shield temperature controlling means are provided to control a temperature of the heat shield to the predetermined value.
    Type: Application
    Filed: February 7, 2001
    Publication date: August 16, 2001
    Inventors: Erik R. Loopstra, Yim Bun P. Kwan, Marcel J.E.H. Muitjens, Sonja T. De Vrieze - Voom