Patents by Inventor Marcel Mulder

Marcel Mulder has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10835922
    Abstract: The present invention relates to an ultrasound transducer device comprising at least one cMUT cell (30) for transmitting and/or receiving ultrasound waves, the cMUT cell (30) comprising a cell membrane (30a) and a cavity (30b) underneath the cell membrane. The device further comprises a substrate (10) having a first side (10a) and a second side (10b), the at least one cMUT cell (30) arranged on the first side (10a) of the substrate (10). The substrate (10) comprises a substrate base layer (12) and a plurality of adjacent trenches (17a) extending into the substrate (10) in a direction orthogonal to the substrate sides (10a, 10b), wherein spacers (12a) are each formed between adjacent trenches (17a). The substrate (10) further comprises a connecting cavity (17b) which connects the trenches (17a) and which extends in a direction parallel to the substrate sides (10a, 10b), the trenches (17a) and the connecting cavity (17b) together forming a substrate cavity (17) in the substrate (10).
    Type: Grant
    Filed: October 11, 2017
    Date of Patent: November 17, 2020
    Assignee: Koninklijke Philips N.V.
    Inventors: Ronald Dekker, Bout Marcelis, Marcel Mulder, Ruediger Mauczok
  • Patent number: 10649341
    Abstract: An immersion lithographic apparatus is disclosed that includes a fluid supply system configured to supply a fluid, the fluid supply system having a chamber with a plurality of inlet holes in a first side wall and a plurality of outlet holes in a second side wall, the first side wall facing the second side wall, wherein the inlet holes direct fluid entering the chamber in a direction towards areas of the second side wall between the plurality of outlet holes.
    Type: Grant
    Filed: October 6, 2016
    Date of Patent: May 12, 2020
    Assignee: ASML Netherlands B.V.
    Inventors: Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens, Erik Henricus Egidius Catharina Eummelen, Marcel Beckers, Richard Moerman, Cédric Désiré Grouwstra, Danny Maria Hubertus Philips, Remko Jan Peter Verhees, Pieter Mulder, Evert Van Vliet
  • Publication number: 20200121886
    Abstract: The present invention provides a system (10) for humidification of a pressurized flow of breathable gas delivered to a patient, the system comprising; a ventilator (12) for generating a pressurized flow of breathable gas; a patient circuit (14) in fluid communication with the ventilator and connectable to the respiratory system of a patient; and an aerosol generator (18). The patient circuit defines an internal space (26) for transporting the flow of breathable gas which internal space accommodates the outflow opening (20) of the aerosol generator. This enables to prevent so-called rainout and a relatively light weight portable system. The invention also relates to an insert (30) that is connectable to the patient circuit and that accommodates the aerosol generator.
    Type: Application
    Filed: June 20, 2018
    Publication date: April 23, 2020
    Inventors: RAINER HILBIG, PASCAL DE GRAAF, MARCEL MULDER, ACHIM GERHARD ROLF KOERBER
  • Patent number: 10327333
    Abstract: The present invention relates to an electronic circuit arrangement (10) comprising: a substrate (12) having a first surface (12a) and a second surface (12b), an electronic circuit, an electrical connection part (16) for providing an electrical connection to the electronic circuit and being arranged on the first surface (12a), and at least one electrical wire (18). The electrical wire (18) comprises at least one conductive core (20) and an isolation (22) surrounding the conductive core (20). An end portion (18a) of the electrical wire (18) is an isolation-free portion for allowing access to the conductive core (20), wherein the end portion (18a) of the electrical wire (18) is connected to the electrical connection part (16). At least one through-hole (24) extending from the first surface (12a) to the second surface (12b) is provided in the substrate (12), wherein the electrical wire (18) is arranged through the through-hole (24).
    Type: Grant
    Filed: February 20, 2013
    Date of Patent: June 18, 2019
    Assignee: Koninklijke Philips N.V.
    Inventors: Ronald Dekker, Vincent Adrianus Henneken, Marcel Mulder
  • Patent number: 10293375
    Abstract: Disclosed is a method of manufacturing a capacitive micro-machined ultrasonic transducer (CMUT) device comprising a first electrode (112) on a substrate (110) and a second electrode (122) embedded in an electrically insulating membrane, the first electrode and the membrane being separated by a cavity (130) formed by the removal of a sacrificial material (116) in between the first electrode and the membrane, the method comprising forming a membrane portion (22) on the second electrode and a further membrane portion (24) extending from the membrane portion towards the substrate alongside the sacrificial material, wherein the respective thicknesses the membrane portion and the further membrane portion exceed the thickness of the sacrificial material prior to forming said cavity. A CMUT device manufactured in accordance with this method and an apparatus comprising such a CMUT device are also disclosed.
    Type: Grant
    Filed: September 15, 2014
    Date of Patent: May 21, 2019
    Assignee: Koninklijke Philips N.V.
    Inventors: Peter Dirksen, Marcel Mulder, Adriaan Leeuwestein
  • Patent number: 10126263
    Abstract: A device for detecting a concentration of a substance in a fluid sample includes a substrate; an insulating layer arranged on the substrate; and a plurality of individually electrically addressable semiconducting nanowires arranged on the insulating layer. Each one of the plurality of nanowires is covered by an insulating material and arranged for sensing of the substance through an electrical characteristic of the nanowire. The device further includes a sample compartment for providing the fluid sample in contact with each of the plurality of nanowires. For each of the plurality of nanowires, at least one of the cross sectional dimension, the insulator thickness and the type of insulating material is selected such that each of the nanowires has a different detection range, and such that the dynamic range of the device is higher than the dynamic range of each of the individual nanowires.
    Type: Grant
    Filed: October 7, 2013
    Date of Patent: November 13, 2018
    Assignee: KONINKLIJKE PHILIPS N.V.
    Inventors: Johan Hendrik Klootwijk, Marcel Mulder
  • Publication number: 20180321206
    Abstract: The invention describes a modular fluid sensing system comprising a fluid sensing terminal (150) and removable fluid channel units (101, 102, 103). The fluid channel units (101, 102, 103) comprise or can be combined with fluid treatment units as filters, sensors and seals. The fluid channel units (101, 102, 103) can be combined in accordance with the present needs of the user of the fluid sensing system. The invention therefore enables a reconfigurable channel system with reconfigurable measurement and treatment options within a fluid sensing system.
    Type: Application
    Filed: November 3, 2016
    Publication date: November 8, 2018
    Inventors: SHUANG CHEN, DECLAN PATRICK KELLY, CORNELIS REINDER RONDA, PASCAL DE GRAAF, NICO MARIS ADRIAAN DE WILD, MARCEL MULDER, JEAN-PAUL JACOBS
  • Patent number: 10008958
    Abstract: The present invention relates to a method of manufacturing a capacitive micro-machined transducer (100), in particular a CMUT, the method comprising depositing a first electrode layer (10) on a substrate (1), depositing a first dielectric film (20) on the first electrode layer (10), depositing a sacrificial layer (30) on the first dielectric film (20), the sacrificial layer (30) being removable for forming a cavity (35) of the transducer, depositing a second dielectric film (40) on the sacrificial layer (30), and depositing a second electrode layer (50) on the second dielectric film (40), wherein the first dielectric film (20) and/or the second dielectric film (40) comprises a first layer comprising an oxide, a second layer comprising a high-k material, and a third layer comprising an oxide, and wherein the depositing steps are performed by Atomic Layer Deposition. The present invention further relates to a capacitive micro-machined transducer (100), in particular a CMUT, manufactured by such method.
    Type: Grant
    Filed: February 18, 2015
    Date of Patent: June 26, 2018
    Assignee: Koninklijke Philips N.V.
    Inventors: Peter Dirksen, Ruediger Mauczok, Koray Karakaya, Johan Hendrik Klootwijk, Bout Marcelis, Marcel Mulder
  • Publication number: 20180029077
    Abstract: The present invention relates to an ultrasound transducer device comprising at least one cMUT cell (30) for transmitting and/or receiving ultrasound waves, the cMUT cell (30) comprising a cell membrane (30a) and a cavity (30b) underneath the cell membrane. The device further comprises a substrate (10) having a first side (10a) and a second side (10b), the at least one cMUT cell (30) arranged on the first side (10a) of the substrate (10). The substrate (10) comprises a substrate base layer (12) and a plurality of adjacent trenches (17a) extending into the substrate (10) in a direction orthogonal to the substrate sides (10a, 10b), wherein spacers (12a) are each formed between adjacent trenches (17a). The substrate (10) further comprises a connecting cavity (17b) which connects the trenches (17a) and which extends in a direction parallel to the substrate sides (10a, 10b), the trenches (17a) and the connecting cavity (17b) together forming a substrate cavity (17) in the substrate (10).
    Type: Application
    Filed: October 11, 2017
    Publication date: February 1, 2018
    Inventors: Ronald Dekker, Bout Marcelis, Marcel Mulder, Ruediger Mauczok
  • Patent number: 9828236
    Abstract: The present invention relates to a method of manufacturing a capacitive micro- machined transducer (100), in particular a CMUT, the method comprising depositing a first electrode layer (10) on a substrate (1), depositing a first dielectric film (20) on the first electrode layer (10), depositing a sacrificial layer (30) on the first dielectric film (20), the sacrificial layer (30) being removable for forming a cavity (35) of the transducer, depositing a second dielectric film (40) on the sacrificial layer (30), depositing a second electrode layer (50) on the second dielectric film (40), and patterning at least one of the deposited layers and films (10, 20, 30, 40, 50), wherein the depositing steps are performed by Atomic Layer Deposition. The present invention further relates to a capacitive micro-machined transducer (100), in particular a CMUT, manufactured by such method.
    Type: Grant
    Filed: January 23, 2013
    Date of Patent: November 28, 2017
    Assignee: KONINKLIJKE PHILIPS N.V.
    Inventors: Peter Dirksen, Ruediger Mauczok, Koray Karakaya, Johan Klootwijk, Bout Marcelis, Marcel Mulder
  • Patent number: 9802224
    Abstract: The present invention relates to an ultrasound transducer device comprising at least one cMUT cell (30) for transmitting and/or receiving ultrasound waves, the cMUT cell (30) comprising a cell membrane (30a) and a cavity (30b) underneath the cell membrane. The device further comprises a substrate (10) having a first side (10a) and a second side (10b), the at least one cMUT cell (30) arranged on the first side (10a) of the substrate (10). The substrate (10) comprises a substrate base layer (12) and a plurality of adjacent trenches (17a) extending into the substrate (10) in a direction orthogonal to the substratesides (10a, 10b), wherein spacers (12a) are each formed between adjacent trenches (17a). The substrate (10) further comprises a connecting cavity (17b) which connects the trenches (17a) and which extends in a direction parallel to the substrate sides (10a, 10b), the trenches (17a) and the connecting cavity (17b) together forming a substrate cavity (17) in the substrate (10).
    Type: Grant
    Filed: December 13, 2012
    Date of Patent: October 31, 2017
    Assignee: KONINKLIJKE PHILIPS N.V.
    Inventors: Ronald Dekker, Bout Marcelis, Marcel Mulder, Ruediger Mauczok
  • Patent number: 9607606
    Abstract: The present invention relates to a method of manufacturing a capacitive micro-machined transducer (100), in particular a CMUT, the method comprising depositing a first electrode layer (10) on a substrate (1), depositing a first dielectric film (20) on the first electrode layer (10), depositing a sacrificial layer (30) on the first dielectric film (20), the sacrificial layer (30) being removable for forming a cavity (35) of the transducer, depositing a second dielectric film (40) on the sacrificial layer (30), depositing a second electrode layer (50) on the second dielectric film (40), and patterning at least one of the deposited layers and films (10, 20, 30, 40, 50), wherein the depositing steps are performed by Atomic Layer Deposition. The present invention further relates to a capacitive micro-machined transducer (100), in particular a CMUT, manufactured by such method.
    Type: Grant
    Filed: November 6, 2013
    Date of Patent: March 28, 2017
    Assignee: KONINKIJKE PHILIPS N.V.
    Inventors: Johan Hendrik Klootwijk, Marcel Mulder, Nico Maris Adriaan De Wild, Koray Karakaya, Cornelius Antonius Van Den Huevel
  • Patent number: 9539854
    Abstract: The patent application discloses a capacitive micromachined ultrasound transducer, comprising a silicon substrate; a cavity; a first electrode, which is arranged between the silicon substrate and the cavity; wherein the first electrode is arranged under the cavity; a membrane, wherein the membrane is arranged above the cavity and opposite to the first electrode; a second electrode, wherein the second electrode is arranged above the cavity and opposite to the first electrode; wherein the second electrode is arranged in or close to the membrane, wherein the first electrode and the second electrode are adapted to be supplied by a voltage; and a first isolation layer, which is arranged between the first electrode and the second electrode, wherein the first isolation layer comprises a dielectric. It is also described a system for generating or detecting ultrasound waves, wherein the system comprises a transducer according to the patent application.
    Type: Grant
    Filed: February 17, 2015
    Date of Patent: January 10, 2017
    Assignee: Koninklijke Philips N.V.
    Inventors: Johan H. Klootwijk, Peter Dirksen, Marcel Mulder, Elisabeth M. L. Moonen
  • Publication number: 20160228915
    Abstract: Disclosed is a method of manufacturing a capacitive micro-machined ultrasonic transducer (CMUT) device comprising a first electrode (112) on a substrate (110) and a second electrode (122) embedded in an electrically insulating membrane, the first electrode and the membrane being separated by a cavity (130) formed by the removal of a sacrificial material (116) in between the first electrode and the membrane, the method comprising forming a membrane portion (22) on the second electrode and a further membrane portion (24) extending from the membrane portion towards the substrate alongside the sacrificial material, wherein the respective thicknesses the membrane portion and the further membrane portion exceed the thickness of the sacrificial material prior to forming said cavity. A CMUT device manufactured in accordance with this method and an apparatus comprising such a CMUT device are also disclosed.
    Type: Application
    Filed: September 15, 2014
    Publication date: August 11, 2016
    Inventors: PETER DIRKSEN, MARCEL MULDER, ADRIAAN LEEUWESTEIN
  • Publication number: 20160003770
    Abstract: Device (100) for detecting a concentration of a substance in a fluid sample, the device comprising: a substrate (102); an insulating layer (104) arranged on the substrate (102); a plurality of individually electrically addressable semiconducting nanowires (106, 108, 110) arranged on the insulating layer (104), each one of the plurality of nanowires being covered by an insulating material (202, 204, 206) and arranged for sensing of the substance through an electrical characteristic of the nanowire; and a sample compartment (118) for providing the fluid sample in contact with each of the plurality of nanowires; wherein for each of the plurality of nanowires (106, 108, 110), at least one of cross sectional dimension, insulator thickness and type of insulating material is selected such that each of the nanowires has a different detection range, and such that the dynamic range of the device is higher than the dynamic range of each of the individual nanowires.
    Type: Application
    Filed: October 7, 2013
    Publication date: January 7, 2016
    Inventors: Johan Hendrik KLOOTWIJK, Marcel MULDER
  • Patent number: 9231496
    Abstract: The present invention relates to a method of manufacturing a capacitive micro-machined transducer (100), in particular a CMUT, the method comprising depositing a first electrode layer (10) on a substrate (1), depositing a first dielectric film (20) on the first electrode layer (10), depositing a sacrificial layer (30) on the first dielectric film (20), the sacrificial layer (30) being removable for forming a cavity (35) of the transducer, depositing a second dielectric film (40) on the sacrificial layer (30), and depositing a second electrode layer (50) on the second dielectric film (40), wherein the first dielectric film (20) and/or the second dielectric film (40) comprises a first layer comprising an oxide, a second layer comprising a high-k material, and a third layer comprising an oxide, and wherein the depositing steps are performed by Atomic Layer Deposition. The present invention further relates to a capacitive micro-machined transducer (100), in particular a CMUT, manufactured by such method.
    Type: Grant
    Filed: January 18, 2013
    Date of Patent: January 5, 2016
    Assignee: Koninklijke Philips N.V.
    Inventors: Peter Dirksen, Ruediger Mauczok, Koray Karakaya, Johan Hendrik Klootwijk, Bout Marcelis, Marcel Mulder
  • Patent number: 9230908
    Abstract: The present invention relates to a through-wafer via device (10) comprising a wafer (12) made of a wafer material and having a first wafer surface (12a) and a second wafer surface (12b) opposing the first wafer surface (12a). The through-wafer via device (10) further comprises a plurality of side by side first trenches (14) provided with a conductive material and extending from the first wafer surface (12a) into the wafer (12) such that a plurality of spacers (16) of the wafer material are formed between the first trenches (14). The through-wafer via device (10) further comprises a second trench (18) provided with the conductive material and extending from the second wafer surface (12b) into the wafer (12), the second trench (18) being connected to the first trenches (14).
    Type: Grant
    Filed: October 12, 2012
    Date of Patent: January 5, 2016
    Assignee: Koninklijke Philips N.V.
    Inventors: Ronald Dekker, Marcelis Bout, Marcel Mulder, Ruediger Mauczok
  • Publication number: 20150294663
    Abstract: The present invention relates to a method of manufacturing a capacitive micro-machined transducer (100), in particular a CMUT, the method comprising depositing a first electrode layer (10) on a substrate (1), depositing a first dielectric film (20) on the first electrode layer (10), depositing a sacrificial layer (30) on the first dielectric film (20), the sacrificial layer (30) being removable for forming a cavity (35) of the transducer, depositing a second dielectric film (40) on the sacrificial layer (30), depositing a second electrode layer (50) on the second dielectric film (40), and patterning at least one of the deposited layers and films (10, 20, 30, 40, 50), wherein the depositing steps are performed by Atomic Layer Deposition. The present invention further relates to a capacitive micro-machined transducer (100), in particular a CMUT, manufactured by such method.
    Type: Application
    Filed: November 6, 2013
    Publication date: October 15, 2015
    Inventors: Johan Hendrik Klootwijk, Marcel Mulder, Nico Maris Adriaan De Wild, Koray Karakaya, Cornelius Antonius Van Den Huevel
  • Patent number: 9132693
    Abstract: The patent application discloses a capacitive micromachined ultrasound transducer, comprising a silicon substrate; a cavity; a first electrode, which is arranged between the silicon substrate and the cavity; wherein the first electrode is arranged under the cavity; a membrane, wherein the membrane is arranged above the cavity and opposite to the first electrode; a second electrode, wherein the second electrode is arranged above the cavity and opposite to the first electrode; wherein the second electrode is arranged in or close to the membrane, wherein the first electrode and the second electrode are adapted to be supplied by a voltage; and a first isolation layer, which is arranged between the first electrode and the second electrode, wherein the first isolation layer comprises a dielectric. It is also described a system for generating or detecting ultrasound waves, wherein the system comprises a transducer according to the patent application.
    Type: Grant
    Filed: September 8, 2009
    Date of Patent: September 15, 2015
    Assignee: Koninklijke Philps N.V.
    Inventors: Johan H. Klootwijk, Peter Dirksen, Marcel Mulder, Elisabeth M. L. Moonen
  • Publication number: 20150162852
    Abstract: The present invention relates to a method of manufacturing a capacitive micro-machined transducer (100), in particular a CMUT, the method comprising depositing a first electrode layer (10) on a substrate (1), depositing a first dielectric film (20) on the first electrode layer (10), depositing a sacrificial layer (30) on the first dielectric film (20), the sacrificial layer (30) being removable for forming a cavity (35) of the transducer, depositing a second dielectric film (40) on the sacrificial layer (30), and depositing a second electrode layer (50) on the second dielectric film (40), wherein the first dielectric film (20) and/or the second dielectric film (40) comprises a first layer comprising an oxide, a second layer comprising a high-k material, and a third layer comprising an oxide, and wherein the depositing steps are performed by Atomic Layer Deposition. The present invention further relates to a capacitive micro-machined transducer (100), in particular a CMUT, manufactured by such method.
    Type: Application
    Filed: February 18, 2015
    Publication date: June 11, 2015
    Inventors: PETER DIRKSEN, RUEDIGER MAUCZOK, KORAY KARAKAYA, JOHAN HENDRIK KLOOTWIJK, BOUT MARCELIS, MARCEL MULDER