Patents by Inventor Marcel Pieter Jacobus PEETERS

Marcel Pieter Jacobus PEETERS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Alignment method and associated metrology device
    Patent number: 11372343
    Abstract: A method of aligning a substrate within an apparatus. The method includes determining a substrate grid based on measurements of a plurality of targets, each at different locations on a substrate. The determining includes repetitions of updating the substrate grid after each measurement of a target, and using the updated grid to align a measurement of a subsequent target.
    Type: Grant
    Filed: February 14, 2020
    Date of Patent: June 28, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Henricus Martinus Johannes Van De Groes, Johannes Hubertus Antonius Van De Rijdt, Marcel Pieter Jacobus Peeters, Chien-Hung Tseng, Henricus Petrus Maria Pellemans
  • ALIGNMENT METHOD AND ASSOCIATED METROLOGY DEVICE
    Publication number: 20220100107
    Abstract: A method of aligning a substrate within an apparatus. The method includes determining a substrate grid based on measurements of a plurality of targets, each at different locations on a substrate. The determining includes repetitions of updating the substrate grid after each measurement of a target, and using the updated grid to align a measurement of a subsequent target.
    Type: Application
    Filed: February 14, 2020
    Publication date: March 31, 2022
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Henricus Martinus Johannes VAN DE GROES, Johannes Hubertus Antonius VAN DE RIJDT, Marcel Pieter Jacobus PEETERS, Chien-Hung TSENG, Henricus Petrus Maria PELLEMANS