Patent number: 6603239
Abstract: The invention relates to a micromanipulator (1, 8, 14, 35) which is used to produce a relative movement between said micromanipulator and an object (7, 13, 25, 34). The micromanipulator (1, 8, 14, 35) has piezoelectric movement elements (3, 10, 15, 16, 17, 43, 44, 45) which are provided with end pieces (6, 12, 22, 23, 24, 46, 47, 48). The inventive micromanipulator is characterized in that the end pieces (6, 12, 22, 23, 24, 46, 47, 48) are magnetic or can be magnetized.
Type:
Grant
Filed:
February 25, 2002
Date of Patent:
August 5, 2003
Assignee:
Forschungszentrum Julich GmbH
Inventors:
Thomas Michely, Marcel Rost, Markus Kaiser