Patents by Inventor Marcel Van Kervinck

Marcel Van Kervinck has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing a device, device manufactured thereby, computer program and lithographic apparatus
    Publication number: 20070182946
    Abstract: A device manufacturing method includes using a patterning device to impart a beam of radiation with a pattern in its cross-section, projecting the patterned beam of radiation onto a plurality of target portions of substantially the same area within a periphery of the substrate, and projecting a beam of radiation onto a substrate edge target portion overlapping an edge of the substrate. A cross-section of the beam projected on the substrate edge target portion has an area smaller than the area of the plurality of target portions of substantially the same area within the periphery of the substrate. A part of the cross-section of the beam is incident on the substrate, and another part of the cross-section of the beam is not incident on the substrate.
    Type: Application
    Filed: April 3, 2007
    Publication date: August 9, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Joost Ottens, Marcel Van Kervinck