Patents by Inventor Marcello Mariani

Marcello Mariani has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230027308
    Abstract: Some embodiments include an integrated assembly having a first bottom electrode adjacent to a second bottom electrode. An intervening region is directly between the first and second bottom electrodes. Capacitor-insulative-material is adjacent to the first and second bottom electrodes. The capacitor-insulative-material is substantially not within the intervening region. Top-electrode-material is adjacent to the capacitor-insulative-material. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: July 20, 2021
    Publication date: January 26, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Durai Vishak Nirmal Ramaswamy, Marcello Mariani, Giorgio Servalli
  • Publication number: 20230014289
    Abstract: Some embodiments include an integrated assembly having first and second pillars of semiconductor material. The first pillar includes a first source/drain region, and the second pillar includes a second source/drain region. First and second bottom electrodes are coupled with the first and second source/drain regions, respectively. The first and second source/drain regions are spaced from one another by an intervening region. First and second leaker-device-structures extend into the intervening region from the first and second bottom electrodes, respectively. Top-electrode-material extends into the intervening region and contacts the first and second leaker-device-structures. Ferroelectric-insulative-material is between the top-electrode-material and the bottom electrodes. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: July 19, 2021
    Publication date: January 19, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Giorgio Servalli, Marcello Mariani
  • Patent number: 11557591
    Abstract: A method used in forming an array of memory cells comprises forming lines of top-source/drain-region material, bottom-source/drain-region material, and channel-region material vertically there-between in rows in a first direction. The lines are spaced from one another in a second direction. The top-source/drain-region material, bottom-source/drain-region material, and channel-region material have respective opposing sides. The channel-region material on its opposing sides is laterally recessed in the second direction relative to the top-source/drain-region material and the bottom-source/drain-region material on their opposing sides to form a pair of lateral recesses in the opposing sides of the channel-region material in individual of the rows. After the pair of lateral recesses are formed, the lines of the top-source/drain-region material, the channel-region material, and the bottom-source/drain-region material are patterned in the second direction to comprise pillars of individual transistors.
    Type: Grant
    Filed: April 22, 2020
    Date of Patent: January 17, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Marcello Mariani, Giorgio Servalli
  • Publication number: 20230010846
    Abstract: Some embodiments include an integrated assembly having first and second pillars of semiconductor material laterally offset from one another. The pillars have source/drain regions and channel regions vertically offset from the source/drain regions. Gating structures pass across the channel regions, and extend along a first direction. An insulative structure is over regions of the first and second pillars, and extends along a second direction which is crosses the first direction. Bottom electrodes are coupled with the source/drain regions. Leaker-device-structures extend upwardly from the bottom electrodes. Ferroelectric-insulative-material is laterally adjacent to the leaker-device-structures and over the regions of the bottom electrodes. Top-electrode-material is over the ferroelectric-insulative-material and is directly against the leaker-device-structures. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: July 9, 2021
    Publication date: January 12, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Marcello Mariani, Giorgio Servalli
  • Publication number: 20220285392
    Abstract: Some embodiments include an integrated assembly having pillars arranged in an array. The pillars have channel regions between upper and lower source/drain regions. Gating structures are proximate to the channel regions and extend along a row direction. Digit lines are beneath the pillars, extend along a column direction, and are coupled with the lower source/drain regions. Linear structures are above the pillars and extend along the column direction. Bottom electrodes are coupled with the upper source/drain regions. The bottom electrodes have horizontal segments adjacent the upper source/drain regions and have vertical segments extending upwardly from the horizontal segments. The vertical segments are adjacent to lateral sides of the linear structures. Ferroelectric-insulative-material and top-electrode-material are over the bottom electrodes. A slit passes through the top-electrode-material, is directly over one of the linear structures, and extends along the column direction.
    Type: Application
    Filed: March 2, 2021
    Publication date: September 8, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Giorgio Servalli, Marcello Mariani
  • Publication number: 20220278001
    Abstract: A method used in forming an array of vertical transistors comprises forming laterally-spaced vertical projections that project upwardly from a substrate in a vertical cross-section. The vertical projections individually comprise an upper source/drain region, a lower source/drain region, and a channel region vertically there-between. First gate insulator material is formed along opposing sidewalls of the channel region in the vertical cross-section. One of (a) or (b) is formed over opposing sidewalls of the first gate insulator material in the vertical cross-section, where (a): conductive gate lines that are horizontally elongated through the vertical cross-section; and (b): sacrificial placeholder gate lines that are horizontally elongated through the vertical cross-section. The one of the (a) or the (b) laterally overlaps the upper source/drain region and the lower source/drain region.
    Type: Application
    Filed: May 16, 2022
    Publication date: September 1, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Marcello Calabrese, Antonino Rigano, Marcello Mariani
  • Patent number: 11373914
    Abstract: A method used in forming an array of vertical transistors comprises forming laterally-spaced vertical projections that project upwardly from a substrate in a vertical cross-section. The vertical projections individually comprise an upper source/drain region, a lower source/drain region, and a channel region vertically there-between. First gate insulator material is formed along opposing sidewalls of the channel region in the vertical cross-section. One of (a) or (b) is formed over opposing sidewalls of the first gate insulator material in the vertical cross-section, where (a): conductive gate lines that are horizontally elongated through the vertical cross-section; and (b): sacrificial placeholder gate lines that are horizontally elongated through the vertical cross-section. The one of the (a) or the (b) laterally overlaps the upper source/drain region and the lower source/drain region.
    Type: Grant
    Filed: September 16, 2020
    Date of Patent: June 28, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Marcello Calabrese, Antonino Rigano, Marcello Mariani
  • Publication number: 20220190004
    Abstract: A method used in forming an array of memory cells comprises forming a vertical stack comprising transistor material directly above insulator material. A mask is used to subtractively etch both the transistor material and thereafter the insulator material to form a plurality of pillars that individually comprise the transistor material and the insulator material. The insulator material is laterally-recessed from opposing lateral sides of individual of the pillars selectively relative to the transistor material of the individual pillars. The individual pillars are formed to comprise a first capacitor electrode that is in void space formed from the laterally recessing. Capacitors are formed that individually comprise the first capacitor electrode of the individual pillars. A capacitor insulator is aside the first capacitor electrode of the individual pillars and a second capacitor electrode is laterally-outward of the capacitor insulator.
    Type: Application
    Filed: February 25, 2022
    Publication date: June 16, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Marcello Mariani, Giorgio Servalli
  • Patent number: 11355531
    Abstract: A method used in forming an array of memory cells comprises forming a vertical stack comprising transistor material directly above insulator material. A mask is used to subtractively etch both the transistor material and thereafter the insulator material to form a plurality of pillars that individually comprise the transistor material and the insulator material. The insulator material is laterally-recessed from opposing lateral sides of individual of the pillars selectively relative to the transistor material of the individual pillars. The individual pillars are formed to comprise a first capacitor electrode that is in void space formed from the laterally recessing. Capacitors are formed that individually comprise the first capacitor electrode of the individual pillars. A capacitor insulator is aside the first capacitor electrode of the individual pillars and a second capacitor electrode is laterally-outward of the capacitor insulator.
    Type: Grant
    Filed: November 30, 2020
    Date of Patent: June 7, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Marcello Mariani, Giorgio Servalli
  • Publication number: 20220173135
    Abstract: A method used in forming an array of memory cells comprises forming a vertical stack comprising transistor material directly above insulator material. A mask is used to subtractively etch both the transistor material and thereafter the insulator material to form a plurality of pillars that individually comprise the transistor material and the insulator material. The insulator material is laterally-recessed from opposing lateral sides of individual of the pillars selectively relative to the transistor material of the individual pillars. The individual pillars are formed to comprise a first capacitor electrode that is in void space formed from the laterally recessing. Capacitors are formed that individually comprise the first capacitor electrode of the individual pillars. A capacitor insulator is aside the first capacitor electrode of the individual pillars and a second capacitor electrode is laterally-outward of the capacitor insulator.
    Type: Application
    Filed: November 30, 2020
    Publication date: June 2, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Marcello Mariani, Giorgio Servalli
  • Publication number: 20220068722
    Abstract: A method used in forming an array of vertical transistors comprises forming laterally-spaced vertical projections that project upwardly from a substrate in a vertical cross-section. The vertical projections individually comprise an upper source/drain region, a lower source/drain region, and a channel region vertically there-between. First gate insulator material is formed along opposing sidewalls of the channel region in the vertical cross-section. One of (a) or (b) is formed over opposing sidewalls of the first gate insulator material in the vertical cross-section, where (a): conductive gate lines that are horizontally elongated through the vertical cross-section; and (h): sacrificial placeholder gate lines that are horizontally elongated through the vertical cross-section. The one of the (a) or the (b) laterally overlaps the upper source/drain region and the lower source/drain region.
    Type: Application
    Filed: September 16, 2020
    Publication date: March 3, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Marcello Calabrese, Antonino Rigano, Marcello Mariani
  • Publication number: 20220037533
    Abstract: Some embodiments include an integrated assembly having a pillar of semiconductor material. The pillar has a base region, and bifurcates into two segments which extend upwardly from the base region. The two segments are horizontally spaced from one another by an intervening region. A conductive gate is within the intervening region. A first source/drain region is within the base region, a second source/drain region is within the segments, and a channel region is within the segments. The channel region is adjacent to the conductive gate and is vertically disposed between the first and second source/drain regions. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: October 15, 2021
    Publication date: February 3, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Antonino Rigano, Marcello Mariani
  • Publication number: 20220020756
    Abstract: Some embodiments include an integrated assembly having a row of conductive posts. The conductive posts are spaced from one another by gaps. Leaker device material extends is within at least some of the gaps. An insulative material is along sidewalls of the conductive posts. A conductive structure is over the conductive posts. The conductive structure has downward projections extending into at least some of the gaps. The leaker device material is configured as segments along sides of the downward projections and extends from the sides to one or more of the conductive posts. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: July 20, 2020
    Publication date: January 20, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Marcello Mariani, Giorgio Servalli
  • Publication number: 20210391334
    Abstract: Some embodiments include an assembly having first and second pillars. Each of the pillars has an inner edge and an outer edge. A first gate is proximate a channel region of the first pillar. A second gate is proximate a channel region of the second pillar. A shield line is between the first and second pillars. First and second bottom electrodes are over the first and second pillars, respectively; and are configured as first and second angle plates. An insulative material is over the first and second bottom electrodes. The insulative material may be ferroelectric or non-ferroelectric. A top electrode is over the insulative material. Some embodiments include methods of forming assemblies.
    Type: Application
    Filed: August 27, 2021
    Publication date: December 16, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Giorgio Servalli, Marcello Mariani
  • Patent number: 11177389
    Abstract: Some embodiments include an integrated assembly having a pillar of semiconductor material. The pillar has a base region, and bifurcates into two segments which extend upwardly from the base region. The two segments are horizontally spaced from one another by an intervening region. A conductive gate is within the intervening region. A first source/drain region is within the base region, a second source/drain region is within the segments, and a channel region is within the segments. The channel region is adjacent to the conductive gate and is vertically disposed between the first and second source/drain regions. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: July 30, 2019
    Date of Patent: November 16, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Antonino Rigano, Marcello Mariani
  • Publication number: 20210335793
    Abstract: A method used in forming an array of memory cells comprises forming lines of top-source/drain-region material, bottom-source/drain-region material, and channel-region material vertically there-between in rows in a first direction. The lines are spaced from one another in a second direction. The top-source/drain-region material, bottom-source/drain-region material, and channel-region material have respective opposing sides. The channel-region material on its opposing sides is laterally recessed in the second direction relative to the top-source/drain-region material and the bottom-source/drain-region material on their opposing sides to form a pair of lateral recesses in the opposing sides of the channel-region material in individual of the rows. After the pair of lateral recesses are formed, the lines of the top-source/drain-region material, the channel-region material, and the bottom-source/drain-region material are patterned in the second direction to comprise pillars of individual transistors.
    Type: Application
    Filed: April 22, 2020
    Publication date: October 28, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Marcello Mariani, Giorgio Servalli
  • Patent number: 11127744
    Abstract: Some embodiments include an assembly having first and second pillars. Each of the pillars has an inner edge and an outer edge. A first gate is proximate a channel region of the first pillar. A second gate is proximate a channel region of the second pillar. A shield line is between the first and second pillars. First and second bottom electrodes are over the first and second pillars, respectively; and are configured as first and second angle plates. An insulative material is over the first and second bottom electrodes. The insulative material may be ferroelectric or non-ferroelectric. A top electrode is over the insulative material. Some embodiments include methods of forming assemblies.
    Type: Grant
    Filed: January 8, 2020
    Date of Patent: September 21, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Giorgio Servalli, Marcello Mariani
  • Publication number: 20210210491
    Abstract: Some embodiments include an assembly having first and second pillars. Each of the pillars has an inner edge and an outer edge. A first gate is proximate a channel region of the first pillar. A second gate is proximate a channel region of the second pillar. A shield line is between the first and second pillars. First and second bottom electrodes are over the first and second pillars, respectively; and are configured as first and second angle plates. An insulative material is over the first and second bottom electrodes. The insulative material may be ferroelectric or non-ferroelectric. A top electrode is over the insulative material. Some embodiments include methods of forming assemblies.
    Type: Application
    Filed: January 8, 2020
    Publication date: July 8, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Giorgio Servalli, Marcello Mariani
  • Publication number: 20210151116
    Abstract: A method of forming a memory device having magnetic tracks individually comprising a plurality of magnetic domains having domain walls, includes forming an elevationally outer substrate material of uniform chemical composition. The uniform composition material is partially etched into to form alternating regions of elevational depressions and elevational protrusions in the uniform composition material. A plurality of magnetic tracks is formed over and which angle relative to the alternating regions. Interfaces of immediately adjacent of the regions individually form a domain wall pinning site in individual of the magnetic tracks. Other methods, including memory devices independent of method, are disclosed.
    Type: Application
    Filed: January 28, 2021
    Publication date: May 20, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Livio Baldi, Marcello Mariani
  • Publication number: 20210125642
    Abstract: Some embodiments include an integrated assembly having digit lines supported by a base and extending along a first direction. A shield-connection-line is supported by the base and extends along the first direction. Transistor active regions are over the digit lines. Each of the active regions includes a channel region between an upper source/drain region and a lower source/drain region. The lower source/drain regions are coupled with the digit lines. Capacitors are coupled with the upper source/drain regions. Wordlines extend along a second direction which crosses the first direction. The wordlines include gate regions adjacent the channel regions. Shield lines extend along the second direction. The shield lines are above the digit lines and are coupled with the shield-connection-line.
    Type: Application
    Filed: October 29, 2019
    Publication date: April 29, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Marcello Mariani, Antonino Rigano