Abstract: A system for differentiating particulate contamination from defects on a surface of a specimen includes an illumination source configured to illuminate the specimen with a light at a predetermined angle relative to the surface of the specimen, an image recording device configured to capture the light reflected from the surface of the specimen in a sensor image, and an evaluation unit configured to receive deflectometry or phase-shifted deflectometry (PSD) image data and dust channel image data from the image recording device, correlate the PSD image data and dust channel image data, and separately output first result information and second result information, the first result information including defect identification information and defect location information and the second result information including contamination identification information and contamination location information.

Abstract: The present invention provides a self-sensing tweezer device for micro and nano-scale manipulation, assembly, and surface modification, including: one or more elongated beams disposed in a first configuration; one or more oscillators coupled to the one or more elongated beams, wherein the one or more oscillators are operable for selectively oscillating the one or more elongated beams to form one or more “virtual” probe tips; and an actuator coupled to the one or more elongated beams, wherein the actuator is operable for selectively actuating the one or more elongated beams from the first configuration to a second configuration.

Abstract: An oscillating probe of an elongated rod, having a first free end, and a second end that is attached to at least one actuator to apply oscillation cycles to the rod. Oscillation of the elongated rod during at least one complete cycle of oscillation of the actuator causes the free end to move in at least one-dimensional envelope, producing a defined virtual probe tip geometry at the free end. The probe is connected to a system for utilizing information sensed as the free end is placed near a surface.

Abstract: A symmetric ultra-precision spindle design in which all forces of constraint are, within the tolerances of manufacturing and assembly processes, symmetrically arranged about its axis. Additionally this design may require little or no external power other than the forces to rotate the spindle.