Abstract: A filtration formed nanostructure pellicle film with an ultra-thin zirconium coating is disclosed. The filtration formed nanostructure pellicle film includes a plurality of nanotubes that are intersected randomly to form an interconnected network structure in a planar orientation with enhanced properties, and a zirconium-coated layer. The coated interconnected structure with the zirconium-coated layer allows for a high minimum EUV transmission rate of at least 88%. The interconnected network structure has a thickness ranging from a lower limit of 3 nm to an upper limit of 100 nm, to allow for effective EUV lithography processing.

Abstract: A filtration formed nanostructure pellicle film is disclosed. The filtration formed nanostructure pellicle film includes a plurality of carbon nanofibers that are intersected randomly to form an interconnected network structure in a planar orientation. The interconnected structure allows for a high minimum EUV transmission rate of at least 92%, with a thickness ranging from a lower limit of 3 nm to an upper limit of 100 nm, to allow for effective EUV lithography processing.

Abstract: Actuators (artificial muscles) comprising twisted polymer fibers generate actuation when powered thermally. In some embodiments, the thermally-powered polymer fiber actuator can be incorporated into an article, such as a textile or garment.

Abstract: An apparatus and method for transferring nanofiber structures (e.g., nanofiber films, nanofiber sheets, stacks of nanofiber grids, nanofiber films, nanofiber sheets, and combinations thereof) between various substrates are described. The techniques described use a soluble layer on a substrate that is subsequently dissolved, thus freeing the nanofiber structure from the substrate. This liquid phase techniques preserves the mechanical integrity and the purity of the nanofiber structures.

Abstract: A filtration formed nanostructure pellicle film is disclosed. The filtration formed nanostructure pellicle film includes a plurality of carbon nanofibers that are intersected randomly to form an interconnected network structure in a planar orientation with enhanced properties by plasma treatment. The interconnected structure allows for a high minimum EUV transmission rate of at least 92%, with a thickness ranging from a lower limit of 3 nm to an upper limit of 100 nm, to allow for effective EUV lithography processing.

Abstract: Nanofiber membranes are described that include multiple layers of nanofiber structures, where each structure is a composite composition of multiwall carbon nanotubes and one or both of single wall and/or few walled carbon nanotubes. By selecting the relative proportions of multiwall and one or more of single/few wall carbon nanotubes in a nanofiber film, the membrane can be fabricated to withstand the heating that occurs during operation in an EUV lithography machine, while also having enough mechanical integrity to withstand pressure changes of between 1 atmosphere (atm) and 2 atm between operating cycles of an EUV lithography machine.

Abstract: A method of storing extreme ultraviolet (EUV) pellicles or pellicle film is disclosed. The method includes selecting a material, such as stainless steel or glass material, for the construction of the storage or transportation containers. Vacuum-sealed or inert-gas-filled containers are further preferred. The material maintains one or more properties of extreme ultraviolet (EUV) lithography pellicle, the one or more properties being selected from EUV transmission rate, EUV transmission variation, EUV scattering, EUV pellicle film deflection, EUV pellicle film tensile strength, or a combination thereof.

Abstract: A filtration formed nanostructure pellicle film is disclosed. The filtration formed nanostructure pellicle film includes a plurality of carbon nanofibers that are intersected randomly to form an interconnected network structure in a planar orientation. The interconnected structure allows for a high minimum EUV transmission rate of at least 92%, with a thickness ranging from a lower limit of 3 nm to an upper limit of 100 nm, to allow for effective EUV lithography processing.

Abstract: Actuators (artificial muscles) comprising twisted polymer fibers generate tensile actuation when powered thermally. In some embodiments, the thermally-powered polymer fiber tensile actuator can be incorporated into an article, such as a textile or garment.

Abstract: Systems for fabricating nanofiber yarn at rates of at least 30 m/min (1.8 kilometers (km)/hour (hr)) using a “false twist” nanofiber yarn spinner and a false twist spinning technique are disclosed. In a false twist spinning technique, a twist is introduced to nanofibers in a strand by twisting the nanofibers at points between ends of the strand. This is in contrast to the “true twist” technique where one end of a strand is fixed and the opposing end of the strand is rotated to introduce the twist to intervening portions of yarn.

Abstract: Systems for fabricating nanofiber yarn at rates of at least 30 m/min (1.8 kilometers (km)/hour (hr)) using a “false twist” nanofiber yarn spinner and a false twist spinning technique are disclosed. In a false twist spinning technique, a twist is introduced to nanofibers in a strand by twisting the nanofibers at points between ends of the strand. This is in contrast to the “true twist” technique where one end of a strand is fixed and the opposing end of the strand is rotated to introduce the twist to intervening portions of yarn.

Abstract: Nanofiber membranes are described that include multiple layers of nanofiber structures, where each structure is a composite composition of multiwall carbon nanotubes and one or both of single wall and/or few walled carbon nanotubes. By selecting the relative proportions of multiwall and one or more of single/few wall carbon nanotubes in a nanofiber film, the membrane can be fabricated to withstand the heating that occurs during operation in an EUV lithography machine, while also having enough mechanical integrity to withstand pressure changes of between 1 atmosphere (atm) and 2 atm between operating cycles of an EUV lithography machine.

Abstract: A filtration formed nanostructure pellicle film is disclosed. The filtration formed nanostructure pellicle film includes a plurality of carbon nanofibers that are intersected randomly to form an interconnected network structure in a planar orientation. The interconnected structure allows for a high minimum EUV transmission rate of at least 92%, with a thickness ranging from a lower limit of 3 nm to an upper limit of 100 nm, to allow for effective EUV lithography processing.

Abstract: Nanofiber membranes are described that include multiple layers of nanofiber structures, where each structure is a composite composition of multiwall carbon nanotubes and one or both of single wall and/or few walled carbon nanotubes. By selecting the relative proportions of multiwall and one or more of single/few wall carbon nanotubes in a nanofiber film, the membrane can be fabricated to withstand the heating that occurs during operation in an EUV lithography machine, while also having enough mechanical integrity to withstand pressure changes of between 1 atmosphere (atm) and 2 atm between operating cycles of an EUV lithography machine.

Abstract: An apparatus and method are described herein for providing tension to carbon nanotube films. An apparatus and method are described herein for transferring carbon nanotube films from a first frame to a second frame. An example method includes deforming a frame by one of a thermal method or a physical method, allowing the frame to return to an original shape, and providing tension to the carbon nanotube film.

Abstract: A filtration formed nanostructure pellicle film is disclosed. The filtration formed nanostructure pellicle film includes a plurality of carbon nanofibers that are intersected randomly to form an interconnected network structure in a planar orientation. The interconnected structure allows for a high minimum EUV transmission rate of at least 92%, with a thickness ranging from a lower limit of 3 nm to an upper limit of 100 nm, to allow for effective EUV lithography processing.

Abstract: A filtration formed nanostructure pellicle film is disclosed. The filtration formed nanostructure pellicle film includes a plurality of carbon nanofibers that are intersected randomly to form an interconnected network structure in a planar orientation. The interconnected structure allows for a high minimum EUV transmission rate of at least 92%, with a thickness ranging from a lower limit of 3 nm to an upper limit of 100 nm, to allow for effective EUV lithography processing.

Abstract: A nanofiber yarn placement system includes a yarn dispenser assembly, and a placement assembly. The placement assembly includes a compliant flange, and a guide connected to the compliant flange. The guide defining a channel. The channel includes at least one internal surface and at least one corner defined by the at least one internal surface.

Abstract: A fabric of nanofibers that includes an adhesive is described. The nanofibers can be twisted or both twisted and coiled prior to formation into a fabric. The adhesive can be selectively applied to or infiltrated within portions of the nanofibers comprising the nanofiber fabric. The adhesive enables connection of the nanofiber fabric to an underlying substrate, even in cases in which the underlying substrate has a three-dimensional topography, while the selective location of the adhesive on the fabric limits the contact area between the adhesive and the nanofibers of the nanofiber fabric. This limited contact area can help preserve the beneficial properties of the nanofibers (e.g., thermal conductivity, electrical conductivity, infra-red (IR) radiation transparency) that otherwise might be degraded by the presence of adhesive.

Abstract: A dispenser is described for dispensing nanofiber yarns that includes a housing that defines an inlet, an outlet, and a chamber. A spool, around which is wound a length of nanofiber yarn, is disposed within the chamber defined by the housing. The nanofiber yarn is threaded from the chamber through the outlet and can be dispensed in a controlled way that reduces the likelihood of developing knots within the nanofiber yarn, and which facilitates convenient application of the yarn onto an underlying surface. In some cases, the dispenser can be used to concurrently dispense an adhesive or other polymer along with the nanofiber yarn.