Patents by Inventor Marco A. Zuniga
Marco A. Zuniga has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20140266113Abstract: A voltage regulator has an input terminal and a ground terminal. The voltage regulator includes a high-side device, a low side device, and a controller. The high-side device is coupled between the input terminal and an intermediate terminal. The high-side device includes first and second transistors each coupled between the input terminal and the intermediate terminal, such that the first transistor controls a drain-source switching voltage of the second transistor. The low-side device is coupled between the intermediate terminal and the ground terminal. The controller drives the high-side and low-side devices to alternately couple the intermediate terminal to the input terminal and the ground terminal.Type: ApplicationFiled: March 14, 2014Publication date: September 18, 2014Applicant: Volterra Semiconductor CorporationInventors: Marco A. Zuniga, Chiteh Chiang, Yang Lu, Badredin Fatemizadeh, Amit Paul, Jun Ruan, Craig Cassella
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Patent number: 8785282Abstract: A method of making a transistor includes etching a first side of a gate, the gate including an oxide layer formed over a substrate and a conductive material formed over the oxide layer, the etching removing a first portion of the conductive material, implanting an impurity region into the substrate such that the impurity region is self-aligned, and etching a second side of the gate to remove a second portion of the conductive material.Type: GrantFiled: December 2, 2013Date of Patent: July 22, 2014Assignee: Volterra Semiconductor CorporationInventor: Marco A. Zuniga
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Publication number: 20140151800Abstract: A LDMOS transistor is implemented in a first impurity region on a substrate. The LDMOS transistor has a source that includes a second impurity region. The second impurity region is implanted into the surface of the substrate within the first impurity region. Additionally, the LDMOS transistor has a drain that includes a third impurity region. The third impurity region is implanted into the surface of the substrate within the first impurity region. The third impurity region is spaced a predetermined distance away from a gate of the LDMOS transistor. The drain of the LDMOS transistor further includes a fourth impurity region within the third impurity region. The fourth impurity region provides an ohmic contact for the drain.Type: ApplicationFiled: February 7, 2014Publication date: June 5, 2014Applicant: Volterra Semiconductor CorporationInventors: Budong You, Marco A. Zuniga
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Publication number: 20140147979Abstract: A method of fabricating a vertical gate region in LDMOS transistor includes depositing a first masking layer on an n-well region implanted on a substrate, patterning the first masking layer to define an area, depositing a second masking layer over the area, etching through the second masking layer in a first portion of the area to expose the n-well region, and etching the exposed n-well region to form a first trench. The first trench, extending from a surface of the n-well region to a first depth, is filled with an oxide. The second masking layer is etched through in a second portion of the area to expose the n-well region. A second trench is formed in the n-well, the second trench extending from the surface to a second depth, less than the first depth. An asymmetric vertical gate is formed by filling the second trench with a conductive material.Type: ApplicationFiled: January 28, 2014Publication date: May 29, 2014Applicant: Volterra Semiconductor CorporationInventors: Marco A. Zuniga, Yang Lu, Badredin Fatemizadeh, Jayasimha Prasad, Amit Paul, Jun Ruan
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Publication number: 20140134834Abstract: A transistor includes a substrate, a well formed in the substrate, a drain including a first impurity region implanted in the well, a source including a second impurity region implanted in the well and spaced apart from the first impurity region, a channel for current flow from the drain to the source, and a gate to control a depletion region between the source and the drain. The channel has an intrinsic breakdown voltage, and the well, drain and source are configured to provide an extrinsic breakdown voltage lower than the intrinsic breakdown voltage and such that breakdown occurs in a breakdown region in the well located outside the channel and adjacent the drain or the source.Type: ApplicationFiled: January 21, 2014Publication date: May 15, 2014Applicant: Volterra Semiconductor CorporationInventors: Yang Lu, Budong You, Marco A. Zuniga, Hamza Yilmaz
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Patent number: 8709899Abstract: The present application features methods of fabricating a gate region in a vertical laterally diffused metal oxide semiconductor (LDMOS) transistor. In one aspect, a method includes depositing a masking layer on an n-well region implanted on a substrate, patterning the masking layer to define an area, and forming a first trench in the area such that a length of the first trench extends from a surface of the n-well region to a first depth in the n-well region. The method also includes filling the first trench by a conductive material and depositing a layer of oxide over the area. The method further includes etching out at least a portion of the oxide layer to expose a portion of the conductive material, removing the conductive material from the exposed portion to form a second trench, and filling the second trench with an oxide to form an asymmetric gate of the transistor.Type: GrantFiled: August 10, 2012Date of Patent: April 29, 2014Assignee: Volterra Semiconductor CorporationInventors: Marco A. Zuniga, Yang Lu, Badredin Fatemizadeh, Jayasimha Prasad, Amit Paul, Jun Ruan, John Xia
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Patent number: 8698242Abstract: A LDMOS transistor is implemented in a first impurity region on a substrate. The LDMOS transistor has a source that includes a second impurity region. The second impurity region is implanted into the surface of the substrate within the first impurity region. Additionally, the LDMOS transistor has a drain that includes a third impurity region. The third impurity region is implanted into the surface of the substrate within the first impurity region. The third impurity region is spaced a predetermined distance away from a gate of the LDMOS transistor. The drain of the LDMOS transistor further includes a fourth impurity region within the third impurity region. The fourth impurity region provides an ohmic contact for the drain.Type: GrantFiled: January 14, 2013Date of Patent: April 15, 2014Assignee: Volterra Semiconductor CorporationInventors: Budong You, Marco A. Zuniga
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Publication number: 20140087531Abstract: A method of making a transistor includes etching a first side of a gate, the gate including an oxide layer formed over a substrate and a conductive material formed over the oxide layer, the etching removing a first portion of the conductive material, implanting an impurity region into the substrate such that the impurity region is self-aligned, and etching a second side of the gate to remove a second portion of the conductive material.Type: ApplicationFiled: December 2, 2013Publication date: March 27, 2014Applicant: Volterra Semiconductor CorporationInventor: Marco A. Zuniga
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Patent number: 8664728Abstract: A transistor includes a substrate, a well formed in the substrate, a drain including a first impurity region implanted in the well, a source including a second impurity region implanted in the well and spaced apart from the first impurity region, a channel for current flow from the drain to the source, and a gate to control a depletion region between the source and the drain The channel has an intrinsic breakdown voltage, and the well, drain and source are configured to provide an extrinsic breakdown voltage lower than the intrinsic breakdown voltage and such that breakdown occurs in a breakdown region in the well located outside the channel and adjacent the drain or the source.Type: GrantFiled: January 14, 2009Date of Patent: March 4, 2014Assignee: Volterra Semiconductor CorporationInventors: Yang Lu, Budong You, Marco A. Zuniga, Hamza Yilmaz
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Patent number: 8647950Abstract: A method of fabricating a vertical gate region in LDMOS transistor includes depositing a first masking layer on an n-well region implanted on a substrate, patterning the first masking layer to define an area, depositing a second masking layer over the area, etching through the second masking layer in a first portion of the area to expose the n-well region, and etching the exposed n-well region to form a first trench. The first trench, extending from a surface of the n-well region to a first depth, is filled with an oxide. The second masking layer is etched through in a second portion of the area to expose the n-well region. A second trench is formed in the n-well, the second trench extending from the surface to a second depth, less than the first depth. An asymmetric vertical gate is formed by filling the second trench with a conductive material.Type: GrantFiled: August 10, 2012Date of Patent: February 11, 2014Assignee: Volterra Semiconductor CorporationInventors: Marco A. Zuniga, Yang Lu, Badredin Fatemizadeh, Jayasimha Prasad, Amit Paul, Jun Ruan
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Patent number: 8598000Abstract: A method of making a transistor is disclosed. The method starts with applying a first photoresist and performing a first etching of the first side of a gate where the gate includes an oxide layer formed over a substrate and a conductive material formed over the oxide layer. The first etching is followed by implanting an impurity region into the substrate while using the first photoresist and the conductive material as a mask making the implantation of the impurity region self-aligned to the gate. The implantation is followed by applying a second photoresist and performing a second etching of the second side of the gate.Type: GrantFiled: March 30, 2010Date of Patent: December 3, 2013Assignee: Volterra Semiconductor CorporationInventor: Marco A. Zuniga
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Patent number: 8574973Abstract: An integrated circuit structure having an LDMOS transistor and a CMOS transistor includes a p-type substrate having a surface, an n-well implanted in the substrate, the first n-well providing a CMOS n-well, a CMOS transistor including a CMOS source with a first p+ region implanted in the n-well, a CMOS drain with a second p+ region implanted in the n-well, and a CMOS gate between the first p+ region and the second p+ region, and an LDMOS transistor including an LDMOS source with an LDMOS source including a p-body implanted in the n-well, a third p+ region implanted in the p-body, and a first n+ region implanted in the p-body, an LDMOS drain including an n-doped shallow drain implanted in the n-well, and a second n+ region implanted in the n-doped shallow drain, and an LDMOS gate between the third p+ region and the second n+ region.Type: GrantFiled: March 13, 2013Date of Patent: November 5, 2013Assignee: Volterra Semiconductor CorporationInventors: Budong You, Marco A. Zuniga
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Publication number: 20130234249Abstract: An LDMOS transistor includes a gate including a conductive material over an insulator material, a source including a first impurity region and a second impurity region, a third impurity region, and a drain including a fourth impurity region and a fifth impurity region. The first impurity region is of a first type, and the second impurity region is of an opposite second type. The third impurity region extends from the source region under the gate and is of the first type. The fourth impurity region is of the second type, the fifth impurity region is of the second type, and the fourth impurity region impinges the third impurity region.Type: ApplicationFiled: April 24, 2013Publication date: September 12, 2013Applicant: Volterra Semiconductor CorporationInventors: Marco A. Zuniga, Budong You, Yang Lu
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Patent number: 8526211Abstract: Methods, systems, and apparatus, including computer program products for programming memory. In one aspect, a program circuit includes a first transistive element; a second transistive element coupled to a first end of the first transistive element; a burn subcircuit, the burn subcircuit including a third transistive element coupled to a fourth transistive element, where the drain of the third transistive element is coupled to a second end of the first transistive element, and the source of the third transistive element is coupled to the drain of the fourth transistive element; and a fifth transistive element coupled in parallel to the fourth transistive element. Control logic coupled to the first transistive element, the burn subcircuit, and the fourth transistive element selectively enables the second transistive element, selectively enables the fourth transistive element, and selectively enables the fifth transistive element to enable a read mode or a program mode.Type: GrantFiled: July 30, 2012Date of Patent: September 3, 2013Assignee: Volterra Semiconductor CorporationInventor: Marco A. Zuniga
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Patent number: 8455340Abstract: A transistor includes a source, a drain and a gate. The source includes a p-doped p-body, a p+ region overlapping the p-body, an n+ region overlapping the p-body in proximity to the p+ region, and an n-doped source, heavily double-diffused (SHDD) region, only into the source region of the transistor, the SHDD region having a depth about equal to that of the first n+ region and overlapping the first n+ region. The drain includes a second n+ region and an n-doped shallow drain overlapping the second n+ region. The gate includes a gate oxide and a conductive material over the gate oxide. The SHDD region extends further laterally than the first n+ region beneath the gate oxide. The SHDD region is implanted using a dopant concentration greater than that of the n-doped shallow drain but less than that of the first n+ region.Type: GrantFiled: July 15, 2011Date of Patent: June 4, 2013Assignee: Volterra Semiconductor CorporationInventors: Marco A. Zuniga, Budong You
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Publication number: 20130115744Abstract: A method of fabricating a vertical gate region in LDMOS transistor includes depositing a first masking layer on an n-well region implanted on a substrate, patterning the first masking layer to define an area, depositing a second masking layer over the area, etching through the second masking layer in a first portion of the area to expose the n-well region, and etching the exposed n-well region to form a first trench. The first trench, extending from a surface of the n-well region to a first depth, is filled with an oxide. The second masking layer is etched through in a second portion of the area to expose the n-well region. A second trench is formed in the n-well, the second trench extending from the surface to a second depth, less than the first depth. An asymmetric vertical gate is formed by filling the second trench with a conductive material.Type: ApplicationFiled: August 10, 2012Publication date: May 9, 2013Applicant: Volterra Semiconductor CorporationInventors: Marco A. Zuniga, Yang Lu, Badredin Fatemizadeh, Jayasimha Prasad, Amit Paul, Jun Ruan
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Publication number: 20130109143Abstract: The present application features methods of fabricating a gate region in a vertical laterally diffused metal oxide semiconductor (LDMOS) transistor. In one aspect, a method includes depositing a masking layer on an n-well region implanted on a substrate, patterning the masking layer to define an area, and forming a first trench in the area such that a length of the first trench extends from a surface of the n-well region to a first depth in the n-well region. The method also includes filling the first trench by a conductive material and depositing a layer of oxide over the area. The method further includes etching out at least a portion of the oxide layer to expose a portion of the conductive material, removing the conductive material from the exposed portion to form a second trench, and filling the second trench with an oxide to form an asymmetric gate of the transistor.Type: ApplicationFiled: August 10, 2012Publication date: May 2, 2013Applicant: Volterra Semiconductor CorporationInventors: Marco A. Zuniga, Yang Lu, Badredin Fatemizadeh, Jayasimha Prasad, Amit Paul, Jun Ruan, John Xia
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Publication number: 20130105888Abstract: The present application features a transistor that includes an n-well region implanted into a surface of a substrate, a gate region, and a source region, and a drain region. The source region is on a first side of the gate region and includes a p-body region in the n-well region. An n+ region and a p+ region are implanted in the p-body region such that the p+ region is below the n+ region. The drain region is on a second side of the gate region and includes an n+ region.Type: ApplicationFiled: August 10, 2012Publication date: May 2, 2013Applicant: Volterra Semiconductor CorporationInventors: Marco A. Zuniga, Yang Lu, Badredin Fatemizadeh, Jayasimha Prasad, Amit Paul, Jun Ruan
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Publication number: 20130105887Abstract: Described here are transistors and fabrication methods thereof. In one implementation, a transistor includes an n-well region implanted into a surface of a substrate, and a trench in the n-well region. The trench extends from the surface to a first depth. The trench includes a gate of conductive material in the trench, and dielectric material filling a volume of the trench not filled by the conductive material. The transistor also includes a p-type material in a first region extending from a second depth to a third depth, the second depth and the third depth being greater than the first depth. The transistor further includes a source region and a drain region.Type: ApplicationFiled: August 10, 2012Publication date: May 2, 2013Applicant: Volterra Semiconductor CorporationInventors: Marco A. Zuniga, Yang Lu, Badredin Fatemizadeh, Jayasimha Prasad, Amit Paul, Jun Ruan
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Patent number: 8431450Abstract: An LDMOS transistor includes a gate including a conductive material over an insulator material, a source including a first impurity region and a second impurity region, a third impurity region, and a drain including a fourth impurity region and a fifth impurity region. The first impurity region is of a first type, and the second impurity region is of an opposite second type. The third impurity region extends from the source region under the gate and is of the first type. The fourth impurity region is of the second type, the fifth impurity region is of the second type, and the fourth impurity region impinges the third impurity region.Type: GrantFiled: January 10, 2011Date of Patent: April 30, 2013Assignee: Volterra Semiconductor CorporationInventors: Marco A. Zuniga, Budong You, Yang Lu