Abstract: Contamination of semiconductor wafers during coating and other operations is mitigated by passing the wafer through a tunnel with a slit providing a gas curtain which impinges upon the wafer as the wafer is transported from one station to the next station in the processing apparatus.

Abstract: The invention relates to an electromagnetic actuator for a surgical or medical instrument, the actuator having a stator (19) and a displaceable element (10), which at least partially comprises a paramagnetic or ferromagnetic material and can be displaced from a first position into a second position by applying an electromagnetic field. The invention is characterized in that the displaceable element (10) is or will be held in the first or in the second position by a permanent magnet.

Abstract: The invention relates to an electromagnetic actuator for a surgical or medical instrument, the actuator having a stator (19) and a displaceable element (10), which at least partially comprises a paramagnetic or ferromagnetic material and can be displaced from a first position into a second position by applying an electromagnetic field. The invention is characterized in that the displaceable element (10) is or will be held in the first or in the second position by a permanent magnet.

Abstract: The invention relates to a sensor or a microphone having such a sensor. The object of the present invention is to improve the degree of development of the sensor or an optical microphone as an air-borne sound sensor. A sensor consisting of a diaphragm, wherein at least on one side the diaphragm comprises a surface which reflects a light beam, wherein on this side a first optical waveguide is constructed as a transmitting waveguide, through which a light beam passes and strikes against the diaphragm, wherein a second optical waveguide constructed at a specific angular relationship to the first optical waveguide is provided, which has the function of a receiving waveguide and into which light reflected from the diaphragm enters, an optical element is constructed in the light path between the transmitting waveguide and the receiving waveguide, by which the light beam is bunched or focussed.