Patents by Inventor Marco Fuhrmann
Marco Fuhrmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11728331Abstract: In a general aspect, a semiconductor device can include a semiconductor region, an active region disposed in the semiconductor region, a termination region disposed on the semiconductor region and adjacent to the active region, and a resistor disposed in the termination region. The resistor can include a trench, a conductive material disposed in the trench, and a first cavity separating the trench from the semiconductor region. A portion of the first cavity can be disposed between a bottom of the trench and the semiconductor region. The resistor can further include a second cavity separating the trench from the semiconductor region.Type: GrantFiled: January 22, 2021Date of Patent: August 15, 2023Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCInventors: Gary Horst Loechelt, Marco Fuhrmann
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Publication number: 20220238512Abstract: In a general aspect, a semiconductor device can include a semiconductor region, an active region disposed in the semiconductor region, a termination region disposed on the semiconductor region and adjacent to the active region, and a resistor disposed in the termination region. The resistor can include a trench, a conductive material disposed in the trench, and a first cavity separating the trench from the semiconductor region. A portion of the first cavity can be disposed between a bottom of the trench and the semiconductor region. The resistor can further include a second cavity separating the trench from the semiconductor region.Type: ApplicationFiled: January 22, 2021Publication date: July 28, 2022Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCInventors: Gary Horst Loechelt, Marco Fuhrmann
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Patent number: 9817023Abstract: A sensor with continuous self test is provided. An exemplary inertial sensor may include one or more self test electrodes so that one or more test signals may be applied to the electrodes during normal operation of the sensor. Normal sensor output may be read and stored during normal operation, when self test signals are typically not applied to the sensor. The normal sensor output provides a baseline for comparison to a sensor offset error detection signal produced when a test signal may be applied to one self test electrode, and also to a sense error detection signal when a test signal may be applied to both self test electrodes.Type: GrantFiled: March 7, 2014Date of Patent: November 14, 2017Assignee: NXP USA, INC.Inventors: Todd F. Miller, Marco Fuhrmann, Tom D. Ohe
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Publication number: 20140182351Abstract: A sensor with continuous self test is provided. An exemplary inertial sensor may include one or more self test electrodes so that one or more test signals may be applied to the electrodes during normal operation of the sensor. Normal sensor output may be read and stored during normal operation, when self test signals are typically not applied to the sensor. The normal sensor output provides a baseline for comparison to a sensor offset error detection signal produced when a test signal may be applied to one self test electrode, and also to a sense error detection signal when a test signal may be applied to both self test electrodes.Type: ApplicationFiled: March 7, 2014Publication date: July 3, 2014Inventors: TODD F. MILLER, MARCO FUHRMANN, TOM D. OHE
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Publication number: 20100122565Abstract: A sensor with continuous self test (101). An exemplary inertial sensor (106) may include one or more self test electrodes (208, 210) so that one or more test signals (402, 404) may be applied to the electrodes (208, 210) during normal operation of the sensor. Normal sensor output may be read and stored (316) during normal operation, when self test signals are typically not applied to the sensor. The normal sensor output provides a baseline for comparison to a sensor offset error detection signal (408) produced when a test signal may be applied to one self test electrode, and also to a sense error detection signal (406) produced when a test signal may be applied to both self test electrodes (208, 210).Type: ApplicationFiled: November 15, 2008Publication date: May 20, 2010Applicant: Freescale Semiconductor, Inc.Inventors: Todd F. Miller, Marco Fuhrmann, Tom D. Ohe
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Patent number: 7673519Abstract: A pressure sensor includes a first set of electrodes, a second set of electrodes, and a common electrode. The first and second sets of electrodes overlie an insulative surface, wherein the first set of electrodes represent sense capacitor bottom electrodes and the second set of electrodes represent reference capacitor bottom electrodes. The second set of electrodes is configured in an interleaved arrangement with the first set of electrodes, wherein the geometry of individual electrodes of the first set of electrodes substantially matches the geometry of individual electrodes of the second set of electrodes.Type: GrantFiled: August 29, 2008Date of Patent: March 9, 2010Assignee: Freescale Semiconductor, Inc.Inventors: Marco Fuhrmann, Dubravka Bilic, Thomas D. Ohe
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Publication number: 20100050776Abstract: A pressure sensor includes a first set of electrodes, a second set of electrodes, and a common electrode. The first and second sets of electrodes overlie an insulative surface, wherein the first set of electrodes represent sense capacitor bottom electrodes and the second set of electrodes represent reference capacitor bottom electrodes. The second set of electrodes is configured in an interleaved arrangement with the first set of electrodes, wherein the geometry of individual electrodes of the first set of electrodes substantially matches the geometry of individual electrodes of the second set of electrodes.Type: ApplicationFiled: August 29, 2008Publication date: March 4, 2010Inventors: Marco Fuhrmann, Dubravka Bilic, Thomas D. Ohe
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Patent number: 7665361Abstract: An apparatus (100, 200) and method (300) for sensing acceleration are provided. The method includes producing (305) a first signal in response to an acceleration sensed by a transducer, producing (310) a second signal based on the first signal, and actuating (315) the transducer in response to the second signal to remove offset in the transducer. The first signal represents the acceleration, and the second signal represents a low frequency component associated with an offset in the transducer. The apparatus (100) includes a transducer (102) producing a capacitance in response to the acceleration, a sensing system (104, 106, 108) producing a first signal from the capacitance representing the acceleration, and a compensation system (112, 110) coupled between the sensing system and transducer. The compensation system produces a second signal based on the first signal for substantially removing an offset of the transducer.Type: GrantFiled: January 25, 2007Date of Patent: February 23, 2010Assignee: Freescale Semiconductor, Inc.Inventors: Todd F. Miller, Marco Fuhrmann, Keith L. Kraver
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Patent number: 7578190Abstract: A symmetrical differential capacitive sensor (60) includes a movable element (66) pivotable about a geometrically centered rotational axis (70). The element (66) includes sections (86, 88). Each of the sections (86, 88) has a stop (94, 96) spaced equally away from the rotational axis (70). Each of the sections (86, 88) also has a different configuration (104, 108) of apertures (102, 106). The configurations (104, 108) of apertures (102, 106) create a mass imbalance between the sections (86, 88) so that the element (66) pivots about the rotational axis (70) in response to acceleration. The apertures (102, 106) also facilitate etch release during manufacturing and reduce air damping when the element (66) rotates. Apertures (126, 128) are formed in electrodes (78, 80) underlying the apertures (102, 106) to match the capacitance between the two sections (86, 88) of movable element (86) to provide the same bi-directional actuation capability.Type: GrantFiled: August 3, 2007Date of Patent: August 25, 2009Assignee: Freescale Semiconductor, Inc.Inventors: Yizhen Lin, Marco Fuhrmann, Andrew C. McNeil
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Publication number: 20090031809Abstract: A symmetrical differential capacitive sensor (60) includes a movable element (66) pivotable about a geometrically centered rotational axis (70). The element (66) includes sections (86, 88). Each of the sections (86, 88) has a stop (94, 96) spaced equally away from the rotational axis (70). Each of the sections (86, 88) also has a different configuration (104, 108) of apertures (102, 106). The configurations (104, 108) of apertures (102, 106) create a mass imbalance between the sections (86, 88) so that the element (66) pivots about the rotational axis (70) in response to acceleration. The apertures (102, 106) also facilitate etch release during manufacturing and reduce air damping when the element (66) rotates. Apertures (126, 128) are formed in electrodes (78, 80) underlying the apertures (102, 106) to match the capacitance between the two sections (86, 88) of movable element (86) to provide the same bi-directional actuation capability.Type: ApplicationFiled: August 3, 2007Publication date: February 5, 2009Applicant: FREESCALE SEMICONDUCTOR, INC.Inventors: Yizhen Lin, Marco Fuhrmann, Andrew C. McNeil
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Publication number: 20080178671Abstract: An apparatus (100, 200) and method (300) for sensing acceleration are provided. The method includes producing (305) a first signal in response to an acceleration sensed by a transducer, producing (310) a second signal based on the first signal, and actuating (315) the transducer in response to the second signal to remove offset in the transducer. The first signal represents the acceleration, and the second signal represents a low frequency component associated with an offset in the transducer. The apparatus (100) includes a transducer (102) producing a capacitance in response to the acceleration, a sensing system (104, 106, 108) producing a first signal from the capacitance representing the acceleration, and a compensation system (112, 110) coupled between the sensing system and transducer. The compensation system produces a second signal based on the first signal for substantially removing an offset of the transducer.Type: ApplicationFiled: January 25, 2007Publication date: July 31, 2008Inventors: Todd F. Miller, Marco Fuhrmann, Keith L. Kraver