Patents by Inventor Marco Johannes Pieters

Marco Johannes Pieters has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for measuring information about a substrate, and a substrate for use in a lithographic apparatus
    Publication number: 20060138410
    Abstract: A method for measuring information provided by a substrate is disclosed. The substrate includes a feature that has been created by a lithographic apparatus. The method includes projecting a beam of light onto a marker disposed above and/or near the feature on the substrate, and detecting information provided by the marker with a sensor. A coating is disposed on the substrate so that the coating lies between the beam of light and the feature to substantially prevent the beam of light from being reflected by the feature and causing an inaccurate readout of the information provided by the marker.
    Type: Application
    Filed: May 24, 2005
    Publication date: June 29, 2006
    Applicant: ASML Netherlands B.V.
    Inventors: Sanjay Lalbahadoersing, Marco Johannes Pieters, Jan Hauschild, Coen Van De Vin