Patents by Inventor Marco NARDONI

Marco NARDONI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for wafer wet processing
    Patent number: 9997379
    Abstract: A gas dispenser in a process module for wet processing of wafer-shaped articles is substantially smaller than the article to be processed and is movable laterally of the article as it dispenses inert gas above the article.
    Type: Grant
    Filed: November 30, 2010
    Date of Patent: June 12, 2018
    Assignee: LAM RESEARCH AG
    Inventors: Harald Kraus, Marco Nardoni, Michael Brugger
  • METHOD AND APPARATUS FOR WAFER WET PROCESSING
    Publication number: 20120131815
    Abstract: A gas dispenser in a process module for wet processing of wafer-shaped articles is substantially smaller than the article to be processed and is movable laterally of the article as it dispenses inert gas above the article.
    Type: Application
    Filed: November 30, 2010
    Publication date: May 31, 2012
    Applicant: LAM RESEARCH AG
    Inventors: Harald KRAUS, Marco NARDONI, Michael BRUGGER