Abstract: Disclosed are techniques and systems for automatically determining and correcting the levelness of a wafer handling robot end effector. The systems may use a tilt sensor or a gravitational field sensor which may be calibrated to the wafer handling robot. The output from the tilt sensor may be used to determine or estimate the tilt of an end effector of the wafer handling robot and to perform correctional positioning to reduce or eliminate the tilt, to automatically teach certain positions that have reduced tilt, to perform health checks on the robot, provide feedback to a user, etc.

Abstract: Systems and techniques for determining and using multiple types of offsets for providing wafers to a wafer support of a wafer station of a semiconductor processing tool are disclosed; such techniques and systems may use an autocalibration wafer that may include a plurality of sensors, including a plurality of edge-located imaging sensors that may be used to image fiducials associated with two different structures located in a selected wafer station.

Abstract: A robotic arm especially suited for laparoscopic surgery, having a torsional joint and a flexural joint forming serially arranged joints is described. The joints provide respective degrees of freedom for the arm, which further receives drive means for such joints. The robotic arm also has transmission means placed between the drive means have and the joints. The transmission means a first and a second assembly of three gear wheels, preferably conical gear wheels, and a train of three additional gear wheels, preferably straight-cut gear wheels, which couple the first and second assembly to form a differential mechanism.

Abstract: A robotic arm especially suited for laparoscopic surgery, having a torsional joint and a flexural joint forming serially arranged joints is described. The joints provide respective degrees of freedom for the arm, which further receives drive means for such joints. The robotic arm also has transmission means placed between the drive means have and the joints. The transmission means a first and a second assembly of three gear wheels, preferably conical gear wheels, and a train of three additional gear wheels, preferably straight-cut gear wheels, which couple the first and second assembly to form a differential mechanism.