Patents by Inventor Marcus Anrianus VAN DE KERKHOF

Marcus Anrianus VAN DE KERKHOF has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • LITHOGRAPHY APPARATUS WITH IMPROVED STABILITY
    Publication number: 20230024490
    Abstract: The present invention relates to methods for improving the resistance of lithography substrate holders to corrosion. The present invention also relates to systems comprising lithography substrate holders with improved corrosion resistance, and to methods of fabricating devices, e.g. integrated circuits, using such systems. The present invention also relates to substrates with backsides configured to preferentially corrode when used in lithography. The present invention has particular use in connection with lithographic apparatus for fabricating devices, for example integrated circuits.
    Type: Application
    Filed: October 29, 2020
    Publication date: January 26, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: Paulus Albertus VAN HAL, Diego MILLO, Aleksandar Nikolov ZDRAVKOV, Marcus Anrianus VAN DE KERKHOF