Abstract: Pump module for a vacuum apparatus with a flange which can be connected to a vacuum apparatus in a vacuum-tight manner, at least one ion getter pump and at least one volume getter pump, NEG, where the ion getter pump is directly connected to the flange and the NEG is directly connected to the ion getter pump and where the NEG and the flange are arranged separately from each other.

Abstract: Flange for a vacuum apparatus comprises a housing to be connected to the vacuum apparatus defining an opening wherein the opening has rectangular narrow shape. The flange further comprises a metal seal arranged around the opening to create a vacuum tight seal.

Abstract: Method for the regeneration of a volume getter pump in a vacuum apparatus with a volume getter pump and an ion getter pump where the operating voltage of the ion getter pump is reduced, the current through the ion getter pump is recorded for determination of the pressure in the vacuum apparatus and then a heating element of the NEG is controlled as a function of the current of the ion getter pump for the purpose of heating the NEG material.

Abstract: Housing for a vacuum pump, in particular a NEG or IGP-NEG combination, comprising a body defining an interior space to accommodate the vacuum pump, wherein a first flange is connected to the housing comprising an opening to connect the vacuum pump to a vessel and a second flange connected to the housing to connect the housing to an additional vacuum pump at least during regeneration. Further, a movable shield element is used movable from a first position to a second position, wherein in the first position the opening of the first flange is unobstructed and in the second position the opening is blocked.

Abstract: An ion pump controller configured to alternate between increasing and decreasing a potential difference between an anode and a cathode of an ion pump multiple times during the starting of pumping.

Abstract: An apparatus includes a first pump module, a second pump module and a sealing disc. The first pump module includes a first flange having a first opening, a second flange having a second opening and at least one first pump. The second pump module includes a third flange having a third opening, a fourth flange having a fourth opening, and at least one second pump. The sealing disc is positioned between and in sealing contact with the second flange and the third flange and has a disc opening with a cross-sectional area that is less than a cross-sectional area of the second opening in the second flange and that is less than a cross-sectional area of the third opening in the third flange, where the disc opening is aligned with the first, second, third and fourth openings.