Patents by Inventor Marcus Kirchhoff

Marcus Kirchhoff has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Photolithographic patterning process using a carbon hard mask layer of diamond-like hardness produced by a plasma-enhanced deposition process
    Publication number: 20050112506
    Abstract: A carbon hard mask layer is applied to a substrate to be patterned by means of a plasma-enhanced deposition process in such a manner that it has a hardness comparable to that of diamond in at least one layer thickness section. During the production of this diamond-like layer thickness section, the parameters used in the deposition are set in such a manner that growth regions which are produced in a form other than diamond-like are removed again in situ by means of subsequent etching processes and that diamond-like regions which are formed are retained.
    Type: Application
    Filed: October 29, 2002
    Publication date: May 26, 2005
    Inventors: Gunter Czech, Carsten Fuelber, Marcus Kirchhoff, Maik Stegemann, Mirko Vogt, Stephan Wege