Patents by Inventor Marcus Martinus Petrus Adrianus Petrus Adrianus VERMEULEN

Marcus Martinus Petrus Adrianus Petrus Adrianus VERMEULEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE SUPPORT AND SUBSTRATE TABLE
    Publication number: 20230075771
    Abstract: A substrate support for supporting a substrate in a lithographic apparatus, the substrate support including: a support body configured to support the substrate; a main body separate from the support body and configured to support the support body, the main body including a thermal conditioner configured to thermally condition the main body and/or support body and/or substrate; and an extractor body surrounding the main body and the support body, the extractor body having an extraction channel configured to extract fluid from near a peripheral part of the substrate.
    Type: Application
    Filed: January 25, 2021
    Publication date: March 9, 2023
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Coen Hubertus Matheus BALTIS, Nicolaas TEN KATE, Marcus Martinus Petrus Adrianus Petrus Adrianus VERMEULEN, Siegfried Alexander TROMP, Frank Pieter Albert VAN DEN BERKMORTEL, Niek Jacobus Johannes ROSET, Gijs KRAMER, Nicolaas Petrus Marcus BRANTJES, Michiel Theodorus Jacobus FONTEYN