Patents by Inventor Marcus Paul Haecki

Marcus Paul Haecki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD TO PREVENT SLURRY CAKING ON CMP CONDITIONER
    Publication number: 20090247054
    Abstract: A method of planarizing a semiconductor structure comprises moving a conditioning element on a surface of a polishing member, rotating the semiconductor structure relative to the polishing member against the surface of the polishing member, and rinsing the surface of the polishing member and the semiconductor structure. While the conditioning element is moved over the surface of the polishing member and the semiconductor structure is rotated against the surface of the polishing member, slurry is directed onto the polishing member. The step of rinsing comprises contacting the conditioning element to the surface of the polishing member.
    Type: Application
    Filed: March 31, 2009
    Publication date: October 1, 2009
    Applicants: TEXAS INSTRUMENTS DEUTSCHLAND GMBH, TEXAS INSTRUMENTS INCORPORATED
    Inventors: Eugene C. Davis, Joerg Walter Haussmann, Marcus Paul Haecki