Patents by Inventor Marcus Petrus SCHEEPERS

Marcus Petrus SCHEEPERS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Radiation collector, radiation source and lithographic apparatus
    Patent number: 9983482
    Abstract: A radiation collector comprising a first collector segment comprising a plurality of grazing incidence reflector shells configured to direct radiation to converge in a first location at a distance from the radiation collector, a second collector segment comprising a plurality of grazing incidence reflector shells configured to direct radiation to converge in a second location at said distance from the radiation collector, wherein the first location and the second location are separated from one another.
    Type: Grant
    Filed: February 26, 2014
    Date of Patent: May 29, 2018
    Assignees: ASML Netherlands B.V., Carl Zeiss SMT GmbH
    Inventors: Erik Roelof Loopstra, Olav Waldemar Vladimir Frijns, Stig Bieling, Antonius Theodorus Wilhelmus Kempen, Ivo Vanderhallen, Nicolaas Ten Kate, Ruud Antonius Catharina Maria Beerens, Richard Henricus Adrianus Van Lieshout, Theodorus Petrus Maria Cadee, Sjoerd Nicolaas Lambertus Donders, Alexander Matthijs Struycken, Marcus Petrus Scheepers
  • Radiation Collector, Radiation Source and Lithographic Apparatus
    Publication number: 20160026091
    Abstract: A radiation collector comprising a first collector segment comprising a plurality of grazing incidence reflector shells configured to direct radiation to converge in a first location at a distance from the radiation collector, a second collector segment comprising a plurality of grazing incidence reflector shells configured to direct radiation to converge in a second location at said distance from the radiation collector, wherein the first location and the second location are separated from one another.
    Type: Application
    Filed: February 26, 2014
    Publication date: January 28, 2016
    Applicants: ASML Netherlands B.V., Carl Zeiss SMT GmbH
    Inventors: Erik Roelof LOOPSTRA, Olav Waldemar Vladimir FRIJNS, Stig BIELING, Antonius Theodorus Wilhelmus KEMPEN, Ivo VANDERHALLEN, Nicolaas TEN KATE, Ruud Antonius Catharina Maria BEERENS, Richard Henricus Adrianus VAN LIESHOUT, Theodorus Petrus Maria CADEE, Sjoerd Nicolaas Lambertus DONDERS, Alexander Matthijs STRUYCKEN, Marcus Petrus SCHEEPERS